High output performance of piezoelectric energy harvesters using epitaxial Pb(Zr, Ti)O3thin film grown on Si substrate

Eun Ji Kim, Sang Hyo Kweon, Sahn Nahm, Yukio Sato, Goon Tan, Isaku Kanno

Research output: Contribution to journalArticlepeer-review

Abstract

For a high power density in piezoelectric energy harvesters, both a large direct piezoelectric coefficient (e31,f) and a small relative permittivity constant (ϵr,33) are required. This study proposed an energy harvesting device made of an epitaxial Pb(Zr, Ti)O3 (PZT) thin film grown on a Si substrate. The epitaxial PZT thin film is deposited on the Si substrate by RF magnetron sputtering. The epitaxial PZT thin film grown on Si substrate has a ϵr,33 constant of 318. The output voltage as a function of input displacement was measured using a shaker to evaluate the direct e31,f coefficients and energy harvester output characteristics. According to the figure of merit defined as (e31,f)2/ϵ0ϵr,33, the epitaxial PZT/Si cantilever is 32 GPa. At a resonant frequency of 373 Hz under an acceleration of 11 m/s2, the epitaxial PZT/Si cantilever has a high output power of 40.93 μW and power density of 108.3 μW/cm2/g2 without any damage, which is very promising for high power energy harvester applications.

Original languageEnglish
Article number161901
JournalApplied Physics Letters
Volume121
Issue number16
DOIs
Publication statusPublished - 2022 Oct 17

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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