High-resolution parallel multipass laser interferometer with an interference fringe spacing of 15 nm

Jeongmin Lee, Hosang Yoon, Tai Hyun Yoon

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

We present a high-resolution laser interferometer based on the parallel multipass configuration with a pair of right-angle prisms to increase the optical fringe subdivision order up to 21. In the experiment, a multipass homodyne Michelson interferometer (MHMI) with the fringe spacing of 15 nm was demonstrated, resulting in the displacement measurement with a measurement resolution of 180 pm limited by the sampling rate of the employed analog-to-digital converter. We show that the ultimate resolution of the demonstrated MHMI scales with 1/N and it is estimated to be 8.7 pm for N=21.

Original languageEnglish
Pages (from-to)1118-1122
Number of pages5
JournalOptics Communications
Volume284
Issue number5
DOIs
Publication statusPublished - 2011 Mar 1

Keywords

  • High-resolution interferometer
  • Interference fringe subdivision
  • Parallel multipass configuration

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering

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