High sensitive NO 2 gas sensor with low power consumption using selectively grown ZnO nanorods

S. J. Park, J. Park, H. Y. Lee, S. E. Moon, K. H. Park, J. Kim, S. Maeng, F. Udrea, W. I. Milne, G. T. Kim

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Abstract

The noble gas sensor using multiple ZnO nanorods was fabricated with CMOS compatible process and sol-gel growth method on selective area and gas response characteristics to NO 2 gas of the sensor device were investigated. We confirmed the sensors had high sensitive response denoted by the sensitivity of several tens for NO 2 gas sensing and also showed pretty low power consumption close to 20 mW even though the recovery of resistance come up to almost the initial value.

Original languageEnglish
Pages (from-to)3385-3388
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume10
Issue number5
DOIs
Publication statusPublished - 2010 May

Keywords

  • Micro heater
  • Semiconducting gas sensor
  • Sol-Gel growth method
  • ZnO nanorods

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'High sensitive NO <sub>2</sub> gas sensor with low power consumption using selectively grown ZnO nanorods'. Together they form a unique fingerprint.

Cite this