High sensitive NO 2 gas sensor with low power consumption using selectively grown ZnO nanorods

S. J. Park, J. Park, H. Y. Lee, S. E. Moon, K. H. Park, J. Kim, S. Maeng, F. Udrea, W. I. Milne, Gyu-Tae Kim

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

The noble gas sensor using multiple ZnO nanorods was fabricated with CMOS compatible process and sol-gel growth method on selective area and gas response characteristics to NO 2 gas of the sensor device were investigated. We confirmed the sensors had high sensitive response denoted by the sensitivity of several tens for NO 2 gas sensing and also showed pretty low power consumption close to 20 mW even though the recovery of resistance come up to almost the initial value.

Original languageEnglish
Pages (from-to)3385-3388
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume10
Issue number5
DOIs
Publication statusPublished - 2010 May 1

Keywords

  • Micro heater
  • Semiconducting gas sensor
  • Sol-Gel growth method
  • ZnO nanorods

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Chemistry(all)
  • Materials Science(all)
  • Bioengineering
  • Biomedical Engineering

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  • Cite this

    Park, S. J., Park, J., Lee, H. Y., Moon, S. E., Park, K. H., Kim, J., Maeng, S., Udrea, F., Milne, W. I., & Kim, G-T. (2010). High sensitive NO 2 gas sensor with low power consumption using selectively grown ZnO nanorods. Journal of Nanoscience and Nanotechnology, 10(5), 3385-3388. https://doi.org/10.1166/jnn.2010.2261