Highly flexible Al-doped ZnO/Ag/Al-doped ZnO multilayer films deposited on PET substrates at room temperature

Jun Ho Kim, Da Som Kim, Sun Kyung Kim, Young Zo Yoo, Jeong Hwan Lee, Sang Woo Kim, Tae Yeon Seong

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23 Citations (Scopus)


We investigated the effects of the Ag layer thickness on the electrical and optical properties of AZO (36nm)/Ag/AZO (36nm) multilayer films that were deposited on polyethylene terephthalate (PET) substrates using a radio frequency magnetron sputtering method. The AZO/Ag/AZO films had transmittances over 74-89% at 550nm. The relationship between the transmittance and the Ag layer thickness was investigated with three-dimensional finite-difference time-domain (3D FDTD) simulations to understand high transmittance. As the Ag layer thickness increased from 15 to 23nm, the carrier concentration increased from 5.84×1021 to 9.66×1021 cm-3, while the sheet resistance decreased from 10.15 to 3.47Ωsq-1. The Haacke figure of merit (FOM) was calculated for the samples with various Ag layer thicknesses; it was a maximum at 19nm (43.9×10-3 Ω-1). The resistance change for the 100nm-thick ITO only films was unstable even after 5 cycles, while that of the AZO (36nm)/Ag (19nm)/AZO (36nm) film remained constant up to 1000 cycles.

Original languageEnglish
JournalCeramics International
Publication statusAccepted/In press - 2015 Aug 25



  • Ag
  • Al-doped ZnO
  • Flexible device
  • Transparent conducting electrode

ASJC Scopus subject areas

  • Ceramics and Composites
  • Process Chemistry and Technology
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Materials Chemistry

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