Highly ordered TiO2 nanotubes on patterned substrates: Synthesis-in-place for ultrasensitive chemiresistors

Do Hong Kim, Young Seok Shim, Hi Gyu Moon, Hye Jung Chang, Dong Su, Soo Young Kim, Jin Sang Kim, Byeong Kwon Ju, Seok Jin Yoon, Ho Won Jang

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23 Citations (Scopus)

Abstract

Integrating a highly ordered TiO2 nanotube array with patterned substrates is an effective design strategy for taking advantage of one-dimensional nanotube structures such as high surface-to-volume ratio and novel functionalities of TiO2, but many challenges remain in synthesis. Here we report a novel synthesis-in-place method for highly ordered vertical TiO2 nanotube films on various patterned substrates and the application of the films to chemiresistive sensors. A unique synthetic strategy, in which the Pt bottom electrodes were clamped during anodization, leads to the complete anodization of the Ti layer to TiO2 nanotubes not only on SiO2/Si substrates but also on glass and sapphire substrates, which can be used as chemiresistors without additional processes. TiO2 nanotube sensors on SiO2/Si substrates show unprecedentedly ultrahigh responses to ethanol and acetone with detection limits down to parts per billion levels. Beyond the high sensitivity, selective responses to ethanol and acetone create opportunities for application in breath analyzers to diagnose human respiratory diseases.

Original languageEnglish
Pages (from-to)17824-17831
Number of pages8
JournalJournal of Physical Chemistry C
Volume117
Issue number34
DOIs
Publication statusPublished - 2013 Aug 29

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ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Energy(all)

Cite this

Kim, D. H., Shim, Y. S., Moon, H. G., Chang, H. J., Su, D., Kim, S. Y., Kim, J. S., Ju, B. K., Yoon, S. J., & Jang, H. W. (2013). Highly ordered TiO2 nanotubes on patterned substrates: Synthesis-in-place for ultrasensitive chemiresistors. Journal of Physical Chemistry C, 117(34), 17824-17831. https://doi.org/10.1021/jp405150b