Highly reflective and low resistance indium tin oxide/ag ohmic contacts to p-type GaN for flip-chip light emitting diodes

Woong K. Hong, June O. Song, Hyun G. Hong, Keun Yong Ban, Takhee Lee, J. S. Kwak, Y. Park, Tae Yeon Seong

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

We report on the formation of high-quality Ag contacts to p-GaN by using indium-tin oxide (ITO) interlayers. The ITO (2 nm)/Ag (200 nm) contacts give specific contact resistances of 3.26-4.34 × 10-4 Ω cm2 when annealed at 330-530°C for 1 min in air. The reflectance of the ITO (2 nm)/Ag (200 nm) is measured to be 85% at 405 nm, which is much better than that of the ITO (55 nm)/Ag (200 nm) and the single Ag contacts. Light-emitting diodes fabricated with the ITO (2 nm)/Ag (200 nm) contact gives much higher output power than those with the ITO (55 nm)/Ag and single-Ag reflective contacts.

Original languageEnglish
JournalElectrochemical and Solid-State Letters
Volume8
Issue number11
DOIs
Publication statusPublished - 2005 Nov 21

Fingerprint

Ohmic contacts
low resistance
Tin oxides
indium oxides
Indium
tin oxides
Light emitting diodes
electric contacts
light emitting diodes
chips
Contact resistance
contact resistance
indium tin oxide
interlayers
reflectance
output
air
Air

ASJC Scopus subject areas

  • Electrochemistry
  • Materials Science(all)

Cite this

Highly reflective and low resistance indium tin oxide/ag ohmic contacts to p-type GaN for flip-chip light emitting diodes. / Hong, Woong K.; Song, June O.; Hong, Hyun G.; Ban, Keun Yong; Lee, Takhee; Kwak, J. S.; Park, Y.; Seong, Tae Yeon.

In: Electrochemical and Solid-State Letters, Vol. 8, No. 11, 21.11.2005.

Research output: Contribution to journalArticle

Hong, Woong K. ; Song, June O. ; Hong, Hyun G. ; Ban, Keun Yong ; Lee, Takhee ; Kwak, J. S. ; Park, Y. ; Seong, Tae Yeon. / Highly reflective and low resistance indium tin oxide/ag ohmic contacts to p-type GaN for flip-chip light emitting diodes. In: Electrochemical and Solid-State Letters. 2005 ; Vol. 8, No. 11.
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AU - Hong, Hyun G.

AU - Ban, Keun Yong

AU - Lee, Takhee

AU - Kwak, J. S.

AU - Park, Y.

AU - Seong, Tae Yeon

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