Highly sensitive H<inf>2</inf>S sensor based on the metal-catalyzed SnO<inf>2</inf> nanocolumns fabricated by glancing angle deposition

Kwang Soo Yoo, Soo Deok Han, Hi Gyu Moon, Seok Jin Yoon, Chong-Yun Kang

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

As highly sensitive H2S gas sensors, Au- and Ag-catalyzed SnO<inf>2</inf> thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 °C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = R<inf>gas</inf>/R<inf>air</inf>) of Au and Ag-catalyzed SnO<inf>2</inf> sensors fabricated by the GAD process were 0.009 and 0.015, respectively, under 5 ppm H<inf>2</inf>S at 300 °C, and the 90% response time was approximately 5 s. These sensors showed excellent sensitivities compared with the SnO<inf>2</inf> thin film sensors that were deposited normally (glancing angle = 0°, S = 0.48).

Original languageEnglish
Pages (from-to)15468-15477
Number of pages10
JournalSensors (Switzerland)
Volume15
Issue number7
DOIs
Publication statusPublished - 2015 Jun 30

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Keywords

  • Glancing angle deposition
  • H<inf>2</inf>S sensor
  • Nanosensor
  • SnO<inf>2</inf> nanocolumn

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Analytical Chemistry
  • Biochemistry

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