Imaging artefacts in atomic force microscopy with carbon nanotube tips

M. C. Strus, A. Raman, Chang-Soo Han, C. V. Nguyen

Research output: Contribution to journalArticle

53 Citations (Scopus)

Abstract

Dynamic atomic force microscopy (dynamic AFM) with carbon nanotube tips has been suggested as an enabling tool for high precision nanometrology of critical dimension features of semiconductor surfaces. We investigate the performance of oscillating AFM microcantilevers with multi-walled carbon nanotube (multi-walled CNT) tips interacting with high aspect ratio structures while in the attractive regime of dynamic AFM. We present experimental results on SiO2 gratings and tungsten nanorods, which show two distinct imaging artefacts, namely the formation of divots and large ringing artefacts that are inherent to CNT AFM probe operation. Through meticulous adjustment of operating parameters, the connection of these artefacts to CNT bending, adhesion, and stiction is described qualitatively and explained.

Original languageEnglish
Pages (from-to)2482-2492
Number of pages11
JournalNanotechnology
Volume16
Issue number11
DOIs
Publication statusPublished - 2005 Nov 1
Externally publishedYes

Fingerprint

Carbon Nanotubes
Atomic Force Microscopy
Artifacts
artifacts
Atomic force microscopy
Carbon nanotubes
carbon nanotubes
atomic force microscopy
Stiction
Imaging techniques
Tungsten
Nanorods
Aspect ratio
Nanotubes
Semiconductors
Adhesion
Semiconductor materials
stiction
high aspect ratio
nanorods

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Imaging artefacts in atomic force microscopy with carbon nanotube tips. / Strus, M. C.; Raman, A.; Han, Chang-Soo; Nguyen, C. V.

In: Nanotechnology, Vol. 16, No. 11, 01.11.2005, p. 2482-2492.

Research output: Contribution to journalArticle

Strus, M. C. ; Raman, A. ; Han, Chang-Soo ; Nguyen, C. V. / Imaging artefacts in atomic force microscopy with carbon nanotube tips. In: Nanotechnology. 2005 ; Vol. 16, No. 11. pp. 2482-2492.
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