Impedance characterization of nanogap interdigitated electrode arrays fabricated by tilted angle evaporation for electrochemical biosensor applications

Dae Young Jeon, So Jeong Park, Yongha Kim, Min Ju Shin, Pil Soo Kang, Gyu-Tae Kim

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Nanogap interdigitated electrode (IDE) arrays were fabricated by tilted angle evaporation on dry etch SiO2 substrates, suggesting a simple, inexpensive, and controllable fabrication technique. The impedance characteristics in a KCl solution clearly showed the differences between nanogap and microscaled IDEs in terms of the peak positions of the phase shift and the ratio of the resistance amplitudes. Moreover, the effect of imperfections on the edge of electrodes was quantitatively discussed through the analysis of electric-field based on finite element method. Our results provide a better understanding of impedance behavior of nanogap IDE arrays for high-performance biochemical applications.

Original languageEnglish
Article number021803
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume32
Issue number2
DOIs
Publication statusPublished - 2014 Jan 1

Fingerprint

bioinstrumentation
Biosensors
Evaporation
evaporation
impedance
Electrodes
electrodes
Phase shift
finite element method
phase shift
Electric fields
Finite element method
Fabrication
Defects
fabrication
electric fields
defects
Substrates

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Impedance characterization of nanogap interdigitated electrode arrays fabricated by tilted angle evaporation for electrochemical biosensor applications. / Jeon, Dae Young; Jeong Park, So; Kim, Yongha; Shin, Min Ju; Soo Kang, Pil; Kim, Gyu-Tae.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 32, No. 2, 021803, 01.01.2014.

Research output: Contribution to journalArticle

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