Improved electrical and reliability characteristics in metal/oxide/nitride/ oxide/silicon capacitors with blocking oxide layers formed under the radical oxidation process

Ho Myoung An, Hee Dong Kim, Yu Jeong Seo, Kyoung Chan Kim, Yun Mo Sung, Sang Mo Koo, Jung Hyuk Koh, Tae Geun Kim

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

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