Improvement of electron emission stability of Mo-tip FEAs by DLC coating

Jae Hoon Jung, Byeong Kwon Ju, Yun Hi Lee, Myung Hwan Oh, Jin Jang

Research output: Contribution to conferencePaper

Abstract

We have studied the improvement of electron emission by diamond-like carbon (DLC) coating on Mo field emitter arrays by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 V to 30 V by 20 nm DLC coating and maximum emission current was increased from 166 μA to 831 μA. Also the gate voltage required to get the anode current of 0.1(μA/emitter) decreases from 77 V to 48 V. Furthermore, the emission current from DLC coated Mo FEAs is more stable than that of non-coated Mo FEAs.

Original languageEnglish
Pages149-152
Number of pages4
Publication statusPublished - 1997
EventProceedings of the 1997 4th Asian Symposium on Information Display - Hong Kong, Hong Kong
Duration: 1997 Feb 131997 Feb 14

Other

OtherProceedings of the 1997 4th Asian Symposium on Information Display
CityHong Kong, Hong Kong
Period97/2/1397/2/14

ASJC Scopus subject areas

  • Engineering(all)

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    Jung, J. H., Ju, B. K., Lee, Y. H., Oh, M. H., & Jang, J. (1997). Improvement of electron emission stability of Mo-tip FEAs by DLC coating. 149-152. Paper presented at Proceedings of the 1997 4th Asian Symposium on Information Display, Hong Kong, Hong Kong, .