Improvement of porous polysilicon nano-structured emitter for vacuum packaged devices

Joo W. Lee, Kyeong K. Paek, Jin Jang, Byeong Kwon Ju

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Porous polysilicon (PPS) emitters were fabricated by depositing an Au thin film on a thermally oxidized polysilicon and their emission properties were examined. The emission properties were also measured for the emitters with various Au thicknesses and the vacuum packaged devices were then developed. The experimental results show that the electrical performances of PPS emitters decreased, because high-temperature packaging process will lead to thermally induced phenomenon between thin layers. We have carried out optimal-thickness variation in Au thickness to improve electron emission properties of PPS emitters packaged. When PPS emitters packaged was driven directly, the field-induced electron emission through anode phosphor was observed.

Original languageEnglish
Pages (from-to)125-130
Number of pages6
JournalJournal of Materials Science: Materials in Electronics
Volume16
Issue number3
DOIs
Publication statusPublished - 2005 Mar 1

Fingerprint

Polysilicon
emitters
Vacuum
vacuum
Electron emission
electron emission
packaging
Phosphors
phosphors
Packaging
Anodes
anodes
Thin films
thin films
Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Improvement of porous polysilicon nano-structured emitter for vacuum packaged devices. / Lee, Joo W.; Paek, Kyeong K.; Jang, Jin; Ju, Byeong Kwon.

In: Journal of Materials Science: Materials in Electronics, Vol. 16, No. 3, 01.03.2005, p. 125-130.

Research output: Contribution to journalArticle

@article{d538097ce6ae4d21b9b2de92f9e655dd,
title = "Improvement of porous polysilicon nano-structured emitter for vacuum packaged devices",
abstract = "Porous polysilicon (PPS) emitters were fabricated by depositing an Au thin film on a thermally oxidized polysilicon and their emission properties were examined. The emission properties were also measured for the emitters with various Au thicknesses and the vacuum packaged devices were then developed. The experimental results show that the electrical performances of PPS emitters decreased, because high-temperature packaging process will lead to thermally induced phenomenon between thin layers. We have carried out optimal-thickness variation in Au thickness to improve electron emission properties of PPS emitters packaged. When PPS emitters packaged was driven directly, the field-induced electron emission through anode phosphor was observed.",
author = "Lee, {Joo W.} and Paek, {Kyeong K.} and Jin Jang and Ju, {Byeong Kwon}",
year = "2005",
month = "3",
day = "1",
doi = "10.1007/s10854-005-6589-2",
language = "English",
volume = "16",
pages = "125--130",
journal = "Journal of Materials Science: Materials in Electronics",
issn = "0957-4522",
publisher = "Springer New York",
number = "3",

}

TY - JOUR

T1 - Improvement of porous polysilicon nano-structured emitter for vacuum packaged devices

AU - Lee, Joo W.

AU - Paek, Kyeong K.

AU - Jang, Jin

AU - Ju, Byeong Kwon

PY - 2005/3/1

Y1 - 2005/3/1

N2 - Porous polysilicon (PPS) emitters were fabricated by depositing an Au thin film on a thermally oxidized polysilicon and their emission properties were examined. The emission properties were also measured for the emitters with various Au thicknesses and the vacuum packaged devices were then developed. The experimental results show that the electrical performances of PPS emitters decreased, because high-temperature packaging process will lead to thermally induced phenomenon between thin layers. We have carried out optimal-thickness variation in Au thickness to improve electron emission properties of PPS emitters packaged. When PPS emitters packaged was driven directly, the field-induced electron emission through anode phosphor was observed.

AB - Porous polysilicon (PPS) emitters were fabricated by depositing an Au thin film on a thermally oxidized polysilicon and their emission properties were examined. The emission properties were also measured for the emitters with various Au thicknesses and the vacuum packaged devices were then developed. The experimental results show that the electrical performances of PPS emitters decreased, because high-temperature packaging process will lead to thermally induced phenomenon between thin layers. We have carried out optimal-thickness variation in Au thickness to improve electron emission properties of PPS emitters packaged. When PPS emitters packaged was driven directly, the field-induced electron emission through anode phosphor was observed.

UR - http://www.scopus.com/inward/record.url?scp=15444376823&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=15444376823&partnerID=8YFLogxK

U2 - 10.1007/s10854-005-6589-2

DO - 10.1007/s10854-005-6589-2

M3 - Article

AN - SCOPUS:15444376823

VL - 16

SP - 125

EP - 130

JO - Journal of Materials Science: Materials in Electronics

JF - Journal of Materials Science: Materials in Electronics

SN - 0957-4522

IS - 3

ER -