Improvement of porous polysilicon nano-structured emitter for vacuum packaged devices

Joo Won Lee, Kyeong Kap Paek, Jin Jang, Byeong Kwon Ju

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Porous polysilicon (PPS) emitters were fabricated by depositing an Au thin film on a thermally oxidized polysilicon and their emission properties were examined. The emission properties were also measured for the emitters with various Au thicknesses and the vacuum packaged devices were then developed. The experimental results show that the electrical performances of PPS emitters decreased, because high-temperature packaging process will lead to thermally induced phenomenon between thin layers. We have carried out optimal-thickness variation in Au thickness to improve electron emission properties of PPS emitters packaged. When PPS emitters packaged was driven directly, the field-induced electron emission through anode phosphor was observed.

Original languageEnglish
Pages (from-to)125-130
Number of pages6
JournalJournal of Materials Science: Materials in Electronics
Volume16
Issue number3
DOIs
Publication statusPublished - 2005 Mar

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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