Improvement of porous polysilicon nano-structured emitter for vacuum packaged devices

Joo Won Lee; Kyeong Kap Paek; Jin Jang; Byeong Kwon Ju

doi:10.1007/s10854-005-6589-2

Improvement of porous polysilicon nano-structured emitter for vacuum packaged devices

Joo Won Lee, Kyeong Kap Paek, Jin Jang, Byeong Kwon Ju

School of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Porous polysilicon (PPS) emitters were fabricated by depositing an Au thin film on a thermally oxidized polysilicon and their emission properties were examined. The emission properties were also measured for the emitters with various Au thicknesses and the vacuum packaged devices were then developed. The experimental results show that the electrical performances of PPS emitters decreased, because high-temperature packaging process will lead to thermally induced phenomenon between thin layers. We have carried out optimal-thickness variation in Au thickness to improve electron emission properties of PPS emitters packaged. When PPS emitters packaged was driven directly, the field-induced electron emission through anode phosphor was observed.

Original language	English
Pages (from-to)	125-130
Number of pages	6
Journal	Journal of Materials Science: Materials in Electronics
Volume	16
Issue number	3
DOIs	https://doi.org/10.1007/s10854-005-6589-2
Publication status	Published - 2005 Mar

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1007/s10854-005-6589-2

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title = "Improvement of porous polysilicon nano-structured emitter for vacuum packaged devices",

abstract = "Porous polysilicon (PPS) emitters were fabricated by depositing an Au thin film on a thermally oxidized polysilicon and their emission properties were examined. The emission properties were also measured for the emitters with various Au thicknesses and the vacuum packaged devices were then developed. The experimental results show that the electrical performances of PPS emitters decreased, because high-temperature packaging process will lead to thermally induced phenomenon between thin layers. We have carried out optimal-thickness variation in Au thickness to improve electron emission properties of PPS emitters packaged. When PPS emitters packaged was driven directly, the field-induced electron emission through anode phosphor was observed.",

author = "Lee, {Joo Won} and Paek, {Kyeong Kap} and Jin Jang and Ju, {Byeong Kwon}",

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AU - Lee, Joo Won

AU - Paek, Kyeong Kap

AU - Jang, Jin

AU - Ju, Byeong Kwon

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N2 - Porous polysilicon (PPS) emitters were fabricated by depositing an Au thin film on a thermally oxidized polysilicon and their emission properties were examined. The emission properties were also measured for the emitters with various Au thicknesses and the vacuum packaged devices were then developed. The experimental results show that the electrical performances of PPS emitters decreased, because high-temperature packaging process will lead to thermally induced phenomenon between thin layers. We have carried out optimal-thickness variation in Au thickness to improve electron emission properties of PPS emitters packaged. When PPS emitters packaged was driven directly, the field-induced electron emission through anode phosphor was observed.

AB - Porous polysilicon (PPS) emitters were fabricated by depositing an Au thin film on a thermally oxidized polysilicon and their emission properties were examined. The emission properties were also measured for the emitters with various Au thicknesses and the vacuum packaged devices were then developed. The experimental results show that the electrical performances of PPS emitters decreased, because high-temperature packaging process will lead to thermally induced phenomenon between thin layers. We have carried out optimal-thickness variation in Au thickness to improve electron emission properties of PPS emitters packaged. When PPS emitters packaged was driven directly, the field-induced electron emission through anode phosphor was observed.

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Improvement of porous polysilicon nano-structured emitter for vacuum packaged devices

Abstract

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