Improvement of uncooled infrared imaging detector by using mesoporous silica as a thermal isolation layer

Sun Gyu Choi, Tae Jung Ha, Byoung Gon Yu, Seung Pil Jaung, Oh Myoung Kwon, Hyung Ho Park

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

Thermal-insulation properties of ordered mesoporous silica could possibly improve the efficiency of uncooled infrared imaging detector by introducing a mesoporous silica layer between TiN absorber and Si3N4 passivation layer. IR absorption rate of 50% porosity mesoporous silica was simulated and the results showed that above 90% infrared absorptance could be achieved in 8-12 μm wavelength region. Thermal conductivity of mesoporous silica was measured by 3ω method. Finite element modeling was used to simulate thermal isolation effect of mesoporous silica inserted structure. The result shows that an effective thermal-insulation effect could be obtained with 150 nm thick mesoporous silica layer. Also according to the simulation result of time transient temperature variation, it was found that mesoporous silica layer for thermal isolation induced an increase of 30% of residual temperature on TiN absorber. The mesoporous silica film was found to be a good thermal isolation layer for microbolometer.

Original languageEnglish
Pages (from-to)833-836
Number of pages4
JournalCeramics International
Volume34
Issue number4
DOIs
Publication statusPublished - 2008 May 1

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Keywords

  • B. Porosity
  • C. Thermal conductivity
  • D. SiO
  • E. Sensors

ASJC Scopus subject areas

  • Ceramics and Composites

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