In situ monitoring of target voltage in magnetron reactive sputtering of ZnO

Youngseok Kim, Samseok Jang, Bum Ryull Park, Dongjin Byun

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'In situ monitoring of target voltage in magnetron reactive sputtering of ZnO'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy