Index-matched indium tin oxide electrodes for capacitive touch screen panel applications

Chan Hwa Hong, Jae Heon Shin, Byeong Kwon Ju, Kyung Hyun Kim, Nae Man Park, Bo Sul Kim, Woo Seok Cheong

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

Index-matched indium tin oxide (ITO) electrodes for capacitive touch screen panels have been fabricated to improve optical transmittance and reduce the difference of reflectance (□R) between the etched and un-etched regions. 8.5 nm Nb2O5 and 49 nm SiO2 thin films were deposited by magnetron sputtering as index-matching layers between an ITO electrode and a glass substrate. In case of 30 nm ITO electrode, a 4.3% improvement in the optical transmittance and a □R of less than 1% were achieved, along with a low sheet resistance of 90 Ω/□.

Original languageEnglish
Pages (from-to)7756-7759
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume13
Issue number11
DOIs
Publication statusPublished - 2013 Nov

Keywords

  • Capacitive touch screen panel
  • Index matched ITO

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'Index-matched indium tin oxide electrodes for capacitive touch screen panel applications'. Together they form a unique fingerprint.

  • Cite this