Index-matched indium tin oxide electrodes for capacitive touch screen panel applications

Chan Hwa Hong, Jae Heon Shin, Byeong Kwon Ju, Kyung Hyun Kim, Nae Man Park, Bo Sul Kim, Woo Seok Cheong

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

Index-matched indium tin oxide (ITO) electrodes for capacitive touch screen panels have been fabricated to improve optical transmittance and reduce the difference of reflectance (□R) between the etched and un-etched regions. 8.5 nm Nb2O5 and 49 nm SiO2 thin films were deposited by magnetron sputtering as index-matching layers between an ITO electrode and a glass substrate. In case of 30 nm ITO electrode, a 4.3% improvement in the optical transmittance and a □R of less than 1% were achieved, along with a low sheet resistance of 90 Ω/□.

Original languageEnglish
Pages (from-to)7756-7759
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume13
Issue number11
DOIs
Publication statusPublished - 2013 Nov 1

Fingerprint

Touch screens
Tin oxides
indium oxides
Indium
tin oxides
Electrodes
Opacity
electrodes
transmittance
Sheet resistance
Magnetron sputtering
Glass
magnetron sputtering
reflectance
Thin films
glass
Substrates
thin films
indium tin oxide

Keywords

  • Capacitive touch screen panel
  • Index matched ITO

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Chemistry(all)
  • Materials Science(all)
  • Bioengineering
  • Biomedical Engineering

Cite this

Index-matched indium tin oxide electrodes for capacitive touch screen panel applications. / Hong, Chan Hwa; Shin, Jae Heon; Ju, Byeong Kwon; Kim, Kyung Hyun; Park, Nae Man; Kim, Bo Sul; Cheong, Woo Seok.

In: Journal of Nanoscience and Nanotechnology, Vol. 13, No. 11, 01.11.2013, p. 7756-7759.

Research output: Contribution to journalArticle

Hong, Chan Hwa ; Shin, Jae Heon ; Ju, Byeong Kwon ; Kim, Kyung Hyun ; Park, Nae Man ; Kim, Bo Sul ; Cheong, Woo Seok. / Index-matched indium tin oxide electrodes for capacitive touch screen panel applications. In: Journal of Nanoscience and Nanotechnology. 2013 ; Vol. 13, No. 11. pp. 7756-7759.
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