Indium tin oxide (ITO) coatings fabricated using nanoparticle slurry and sol

Deock Soo Cheong, Dong Hun Yun, Dong Hwan Kim, Kyoung R. Han

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Indium tin oxide (ITO) coatings were made using an ITO slurry and an ITO sol. This was achieved by dispersing nanosized ITO powder in a mixed solvent without any dispersant and developing an adhesive ITO sol from indium acetate and tin tetrachloride in a mixture of DMF and n-butanol. Coating was carried out in one step by spin coating an ITO slurry, which was then followed by an ITO sol over it. Here, the sol penetrates into the nano ITO particle layers to make them adhere to each other as well as to a glass substrate. This is then followed by sintering at 500°C for 1 h to produce a uniform film consisting of ITO particles of about 50 nm and 10 nm. ITO films were obtained with sheet resistances from 450 to 1500 ohm/□ by varying spin speed and concentration. Transmittance is higher than 90% at 550 nm.

Original languageEnglish
Pages (from-to)516-519
Number of pages4
JournalJournal of the Korean Ceramic Society
Issue number6
Publication statusPublished - 2011 Nov


  • Double-coating
  • ITO film
  • ITO slurry
  • Sheet resistance
  • Sol-gel

ASJC Scopus subject areas

  • Ceramics and Composites


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