Indium-tin oxide/Si contacts with In- and Sn-diffusion barriers in polycrystalline Si thin-film transistor liquid-crystal displays

Hojin Ryu, Jinmo Kang, Younggun Han, Donghwan Kim, James Jungho Pak, Won Kyu Park, Myoung Su Yang

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

Indium and tin were used as the diffusion barrier between indium-tin oxide (ITO) and polycrystalline-silicon layers to reduce the contact resistance. The ITO/Si contacts may be adopted in thin-film transistor liquid-crystal displays (TFT-LCD) to reduce the number of fabrication steps. With In and Sn layers, contact-resistance values of 5 × 10 -3-4 × 10 -3 Ωcm 2 were obtained. These values were higher than those of the conventional ITO/Mo/Al/Si contacts (3 × 10 -5-4 × 10 -4 Ωcm 2)but lower than the values obtained from ITO/Si contacts (about 1 × 10 -2 Ωcm 2). The Sn was stable after annealing, but In diffused into Si and lost its function as the diffusion barrier.

Original languageEnglish
Pages (from-to)919-924
Number of pages6
JournalJournal of Electronic Materials
Volume32
Issue number9
Publication statusPublished - 2003 Sep 1

Fingerprint

Diffusion barriers
Thin film transistors
Tin oxides
Liquid crystal displays
indium oxides
Indium
tin oxides
transistors
liquid crystals
Contact resistance
thin films
contact resistance
Tin
Polysilicon
indium
tin
Annealing
Fabrication
fabrication
annealing

Keywords

  • Contact resistance
  • Diffusion barrier
  • In
  • ITO
  • Poly-Si
  • Sn
  • TFT-LCD

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Indium-tin oxide/Si contacts with In- and Sn-diffusion barriers in polycrystalline Si thin-film transistor liquid-crystal displays. / Ryu, Hojin; Kang, Jinmo; Han, Younggun; Kim, Donghwan; Pak, James Jungho; Park, Won Kyu; Yang, Myoung Su.

In: Journal of Electronic Materials, Vol. 32, No. 9, 01.09.2003, p. 919-924.

Research output: Contribution to journalArticle

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AU - Han, Younggun

AU - Kim, Donghwan

AU - Pak, James Jungho

AU - Park, Won Kyu

AU - Yang, Myoung Su

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