Inductively coupled plasma etching of hafnium-indium-zinc oxide using chlorine based gas mixtures

Yong Hee Choi, Ho Kyun Jang, Jun Eon Jin, Min Kyu Joo, Mingxing Piao, Jong Mok Shin, Jae Sung Kim, Junhong Na, Gyu-Tae Kim

Research output: Contribution to journalArticle

Abstract

We report the etching characteristics of a stacked hafnium-indium-zinc oxide (HIZO) with a photoresist using the gas mixture of chlorine and argon (Cl2/Ar). The etching behaviors of HIZO have been investigated in terms of a source power, a bias power and a chamber pressure. As the concentration of Cl2 was increased compared to pure Ar, the etch rate of HIZO film was found slightly different from that of indium-zinc oxide (IZO) film. Moreover, to investigate the etching mechanism systematically, various inspections were carried out such as atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) depending on the portion of Cl2. Additionally, we compared the etching mechanism of HIZO film with IZO film to confirm the difference of chemical bonds caused by the influence of hafnium doping.

Original languageEnglish
Article number046503
JournalJapanese Journal of Applied Physics
Volume53
Issue number4
DOIs
Publication statusPublished - 2014 Jan 1

Fingerprint

Hafnium
Plasma etching
hafnium
Inductively coupled plasma
plasma etching
Zinc oxide
Gas mixtures
zinc oxides
indium oxides
Indium
Chlorine
chlorine
gas mixtures
Oxide films
oxide films
Etching
etching
pressure chambers
Chemical bonds
Photoresists

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Inductively coupled plasma etching of hafnium-indium-zinc oxide using chlorine based gas mixtures. / Choi, Yong Hee; Jang, Ho Kyun; Jin, Jun Eon; Joo, Min Kyu; Piao, Mingxing; Shin, Jong Mok; Kim, Jae Sung; Na, Junhong; Kim, Gyu-Tae.

In: Japanese Journal of Applied Physics, Vol. 53, No. 4, 046503, 01.01.2014.

Research output: Contribution to journalArticle

Choi, Yong Hee ; Jang, Ho Kyun ; Jin, Jun Eon ; Joo, Min Kyu ; Piao, Mingxing ; Shin, Jong Mok ; Kim, Jae Sung ; Na, Junhong ; Kim, Gyu-Tae. / Inductively coupled plasma etching of hafnium-indium-zinc oxide using chlorine based gas mixtures. In: Japanese Journal of Applied Physics. 2014 ; Vol. 53, No. 4.
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