Industrial 6 inch multicrystalline silicon solar cells fabricated using reactive ion etching with efficiency exceeding 18%

Ji Myung Shim, Hyun Woo Lee, Kyeong Yeon Cho, Eun Joo Lee, Ji Soo Kim, Ji Hyun Kong, Soo Jeong Jo, Ji Sun Kim, Haeseok Lee

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

To obtain a lower reflectance, we applied a maskless plasma texturing technique by reactive ion etching (RIE) to acid-textured multicrystalline silicon (mc-Si) wafer. RIE texturing produced a deep and narrow textured surface with an excellent low reflectance. Owing to plasma-induced damage, unless the RIE-textured surface is subjected to proper damage removal etching (DRE), it shows drops in open circuit voltage (V oc) and fill factor (FF). RIE-textured samples with proper DRE showed sufficiently higher short circuit current (I sc) than acid-textured samples without a drop in V oc. In this study, we applied RIE texturing under optimized DRE condition to the selective emitter structure. In comparison with the acidtextured solar cells, RIE-textured solar cells have absolute gains in I sc above 200 mA. We successfully fabricated a 6-in. mc-Si solar cell with a conversion efficiency exceeding 18% by applying selective emitter technology with RIE texturing.

Original languageEnglish
Article number10NA14
JournalJapanese Journal of Applied Physics
Volume51
Issue number10 PART 2
DOIs
Publication statusPublished - 2012 Oct 1
Externally publishedYes

Fingerprint

Silicon solar cells
Reactive ion etching
solar cells
etching
Texturing
ions
Etching
damage
Solar cells
Plasmas
Acids
emitters
Open circuit voltage
Silicon wafers
Short circuit currents
reflectance
Conversion efficiency
acids
short circuit currents
open circuit voltage

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Industrial 6 inch multicrystalline silicon solar cells fabricated using reactive ion etching with efficiency exceeding 18%. / Shim, Ji Myung; Lee, Hyun Woo; Cho, Kyeong Yeon; Lee, Eun Joo; Kim, Ji Soo; Kong, Ji Hyun; Jo, Soo Jeong; Kim, Ji Sun; Lee, Haeseok.

In: Japanese Journal of Applied Physics, Vol. 51, No. 10 PART 2, 10NA14, 01.10.2012.

Research output: Contribution to journalArticle

Shim, Ji Myung ; Lee, Hyun Woo ; Cho, Kyeong Yeon ; Lee, Eun Joo ; Kim, Ji Soo ; Kong, Ji Hyun ; Jo, Soo Jeong ; Kim, Ji Sun ; Lee, Haeseok. / Industrial 6 inch multicrystalline silicon solar cells fabricated using reactive ion etching with efficiency exceeding 18%. In: Japanese Journal of Applied Physics. 2012 ; Vol. 51, No. 10 PART 2.
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