Influence of anatase-rutile phase transformation on dielectric properties of sol-gel derived TiO2 thin films

Jun Hong Noh, Hyun Suk Jung, Jung Hong No, Jeong Ryeol Kim, Kug Sun Hong

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The phase transformation behavior and resulting dielectric properties of sol-gel derived TiO2 thin films were investigated. Thin films showed a typical behavior of mixture systems during the phase transformation; a kinetic investigation on the isothermal curve of pre-crystallized thin films revealed that the phase transformation was a first-order reaction with an Avrami time component of 1. Dielectric constants of TiO2 thin films increased with the increasing amount of the rutile phase while the dielectric losses showed the opposite relationship. From a fitting process using the parallel mixing rule, dielectric constants of two end members of the mixture system were calculated to be 41.4 and 145.2 for the pure anatase and rutile phase thin films, respectively.

Original languageEnglish
Pages (from-to)447-451
Number of pages5
JournalJournal of Electroceramics
Issue number4
Publication statusPublished - 2006 Jul 1
Externally publishedYes



  • Dielectric property
  • Phase transformation
  • Sol-gel method
  • Thin film
  • TiO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Mechanics of Materials
  • Materials Chemistry
  • Electrical and Electronic Engineering

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