Influence of etching slope on two-dimensional photonic crystal slab resonators

Myung Ki Kim, In Kag Hwang, Jin Kyu Yang, Yong Hee Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The influence of etching slope on cavity Q-factors in two-dimensional (2D) photonic crystal (PhC) slab is studied. Through FDTD simulation, it is confirmed that the Q-factor decreases with etching slope. The main loss comes from the horizontal coupling into propagating TM-modes. We designed three-lattice-long modified linear cavities having high Q-factors. However, the measured Q-factor was about 250. This small Q-factor is attributed to the non-vertical (13°) side wall.

Original languageEnglish
Title of host publicationOptoelectronic Materials and Devices
DOIs
Publication statusPublished - 2006 Dec 27
Externally publishedYes
EventOptoelectronic Materials and Devices - Gwangju, Korea, Republic of
Duration: 2006 Sep 52006 Sep 7

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6352 I
ISSN (Print)0277-786X

Other

OtherOptoelectronic Materials and Devices
CountryKorea, Republic of
CityGwangju
Period06/9/506/9/7

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Keywords

  • Etching slope
  • Nanocavity
  • Photonic crystal
  • Q-factor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Kim, M. K., Hwang, I. K., Yang, J. K., & Lee, Y. H. (2006). Influence of etching slope on two-dimensional photonic crystal slab resonators. In Optoelectronic Materials and Devices [63520P] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6352 I). https://doi.org/10.1117/12.688885