Influence of plasma-etch damage on the interface states in SOI structures investigated by capacitance-voltage measurements and simulations

Yeong Deuk Jo, Jung Hyuk Koh, Jae Geun Ha, Ji Hong Kim, Dae Hyung Cho, Byung Moo Moon, Sang Mo Koo

Research output: Contribution to journalArticle

1 Citation (Scopus)

Fingerprint Dive into the research topics of 'Influence of plasma-etch damage on the interface states in SOI structures investigated by capacitance-voltage measurements and simulations'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy