Influence of post-annealing on the electrical properties of metal/oxide/silicon nitride/oxide/silicon capacitors for flash memories

Hee Dong Kim, Ho Myoung An, Kyoung Chan Kim, Yu Jeong Seo, Tae Geun Kim

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We report the effect of post-annealing on the electrical properties of metal/oxide/silicon nitride/oxide/silicon (MONOS) capacitors. Four samples, namely as-deposited and annealed at 750, 850 and 950 °C for 30 s in nitrogen ambient by a rapid thermal process, were prepared and characterized for comparison. The best performance with the largest memory window of 4.4 V and the fastest program speed of 10 ms was observed for the sample annealed at 850 °C. In addition, the highest traps density of 6.84 × 1018 cm-3 was observed with ideal trap distributions for the same sample by capacitance-voltage (C-V) measurement. These results indicate that the memory traps in the ONO structure can be engineered by post-annealing to improve the electrical properties of the MONOS device.

Original languageEnglish
Article number075046
JournalSemiconductor Science and Technology
Volume23
Issue number7
DOIs
Publication statusPublished - 2008 Jul 1

Fingerprint

metal-nitride-oxide-silicon
Flash memory
Silicon oxides
Silicon nitride
silicon oxides
Oxides
flash
capacitors
Electric properties
Capacitors
Metals
electrical properties
traps
Annealing
Data storage equipment
annealing
Capacitance measurement
Voltage measurement
Nitrogen
electrical measurement

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Influence of post-annealing on the electrical properties of metal/oxide/silicon nitride/oxide/silicon capacitors for flash memories. / Kim, Hee Dong; An, Ho Myoung; Kim, Kyoung Chan; Seo, Yu Jeong; Kim, Tae Geun.

In: Semiconductor Science and Technology, Vol. 23, No. 7, 075046, 01.07.2008.

Research output: Contribution to journalArticle

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