Influence of sputtering conditions on structural and electrochemical properties of the Si anode film for lithium secondary batteries

Seung Hyun Joo, Seong Rae Lee, Won I. Cho, Byung Won Cho

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This study investigated the dependence of the various sputtering conditions (Ar pressure: 2-10 mTorr, Power: 50-150 W) and thickness (50-1200 nm) of Si thin film on the electrochemical properties, microstructural properties and the capacity fading of a Si thin film anode. A Si layer and a Ti buffer layer were deposited on Copper foil by RF-magnetron sputtering. At 10 mTorr, the 50 W sample showed the best capacity of 3323 mAh/g, while the 100 W sample showed the best capacity retention of 91.7%, also at 10 mTorr. The initial capacities and capacity retention in the samples apart from the 50 W sample at 10 mTorr were enhanced as the Ar pressure and power increased. This was considered to be related to the change of the microstructure and the surface morphology by various sputtering conditions. In addition, thinner Si film anodes showed better cycling performance. This phenomenon is caused by the structural stress and peeling off of the Si layer by the high volume change of Si during the charge/discharge process.

Original languageEnglish
Pages (from-to)73-78
Number of pages6
JournalKorean Journal of Materials Research
Issue number2
Publication statusPublished - 2009 Aug 19



  • Deposition condition
  • Lithium ion battery
  • Silicon anode
  • Sputtering

ASJC Scopus subject areas

  • Materials Science(all)

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