Influence of thermal stress on heat-generating performance of indium tin oxide nanoparticle thin films

Kyungwhan Yang, Kyoungah Cho, Sangsig Kim, Kiju Im

Research output: Contribution to journalArticle

Abstract

In this study, the authors investigate the influence of thermal stress on the heat-generating performance of indium tin oxide (ITO) nanoparticle (NP) thin films on quartz substrates. ITO NP thin films experience repeated thermal stresses during their electrical heating cycles. As the number of the heating cycles increases to 50, the highest temperature of the ITO NP thin film decreases from 317 to 221 °C. Our analysis of the temperature profiles, morphological images, and electrical resistance reveals that the degradation in the heat-generating performance is closely correlated with microcracks in the oxide thin film caused by thermal stresses.

Original languageEnglish
Article number06KA02
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume34
Issue number6
DOIs
Publication statusPublished - 2016 Nov 1

Fingerprint

thermal stresses
Tin oxides
Thermal stress
indium oxides
Indium
tin oxides
Nanoparticles
Thin films
heat
nanoparticles
thin films
Heating
cycles
Quartz
heating
Acoustic impedance
microcracks
Microcracks
electrical resistance
temperature profiles

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Influence of thermal stress on heat-generating performance of indium tin oxide nanoparticle thin films. / Yang, Kyungwhan; Cho, Kyoungah; Kim, Sangsig; Im, Kiju.

In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 34, No. 6, 06KA02, 01.11.2016.

Research output: Contribution to journalArticle

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