Influence of width of specimen on tensile properties of NiCo thin film

Jun Hyub Park, Joong Hyok An, Yun Bae Jeon, Yun Jae Kim, Yong Hak Huh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper represents the results of tensile test for NiCo thin films, to investigate the size effect on tensile properties. An axial loading tensile tester developed by authors was used to measure the mechanical characteristics of thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry. The "dog-bone" type specimen was designed and fabricated by electroplating process. The 50 and 150μm width of reduced section respectively were designed on 6 in. wafer. The length of reduced section is 1,000μm and the radius of the blending fillet is 1,000μm to minimize a stress concentration of the specimen. The thickness is 10μm. The elastic moduli of NiCo thin film were about 18 ± 4.1GPa for 50μm width and about 148 ± 8.4GPa for 150μm width. The ultimate tensile strength for the width of 50 and 150μm were 2,431±87.8 and 2,348±93.3MPa, respectively. However, the difference between tensile strengths is a little, as 3.3%.

Original languageEnglish
Title of host publicationEngineering Against Fracture - Proceedings of the 1st Conference
PublisherSpringer Science+Business Media B.V.
Pages93-102
Number of pages10
ISBN (Print)9781402094019
DOIs
Publication statusPublished - 2009
Event1st International Conference of Engineering Against Fracture, ICEAF 2008 - Patras, Greece
Duration: 2008 May 282008 May 30

Publication series

NameEngineering Against Fracture - Proceedings of the 1st Conference

Other

Other1st International Conference of Engineering Against Fracture, ICEAF 2008
CountryGreece
CityPatras
Period08/5/2808/5/30

Keywords

  • MEMS applications
  • Micro-tensile stress-strain curves
  • NiCo thin films

ASJC Scopus subject areas

  • Food Science

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  • Cite this

    Park, J. H., An, J. H., Jeon, Y. B., Kim, Y. J., & Huh, Y. H. (2009). Influence of width of specimen on tensile properties of NiCo thin film. In Engineering Against Fracture - Proceedings of the 1st Conference (pp. 93-102). (Engineering Against Fracture - Proceedings of the 1st Conference). Springer Science+Business Media B.V.. https://doi.org/10.1007/978-1-4020-9402-6_8