Abstract
This paper represents the results of tensile test for NiCo thin films, to investigate the size effect on tensile properties. An axial loading tensile tester developed by authors was used to measure the mechanical characteristics of thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry. The "dog-bone" type specimen was designed and fabricated by electroplating process. The 50 and 150μm width of reduced section respectively were designed on 6 in. wafer. The length of reduced section is 1,000μm and the radius of the blending fillet is 1,000μm to minimize a stress concentration of the specimen. The thickness is 10μm. The elastic moduli of NiCo thin film were about 18 ± 4.1GPa for 50μm width and about 148 ± 8.4GPa for 150μm width. The ultimate tensile strength for the width of 50 and 150μm were 2,431±87.8 and 2,348±93.3MPa, respectively. However, the difference between tensile strengths is a little, as 3.3%.
| Original language | English |
|---|---|
| Title of host publication | Engineering Against Fracture - Proceedings of the 1st Conference |
| Publisher | Springer Science+Business Media B.V. |
| Pages | 93-102 |
| Number of pages | 10 |
| Publication status | Published - 2009 Jan 1 |
| Event | 1st International Conference of Engineering Against Fracture, ICEAF 2008 - Patras, Greece Duration: 2008 May 28 → 2008 May 30 |
Other
| Other | 1st International Conference of Engineering Against Fracture, ICEAF 2008 |
|---|---|
| Country | Greece |
| City | Patras |
| Period | 08/5/28 → 08/5/30 |
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Keywords
- MEMS applications
- Micro-tensile stress-strain curves
- NiCo thin films
ASJC Scopus subject areas
- Food Science
Cite this
Influence of width of specimen on tensile properties of NiCo thin film. / Park, Jun Hyub; An, Joong Hyok; Jeon, Yun Bae; Kim, Yun-Jae; Huh, Yong Hak.
Engineering Against Fracture - Proceedings of the 1st Conference. Springer Science+Business Media B.V., 2009. p. 93-102.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Influence of width of specimen on tensile properties of NiCo thin film
AU - Park, Jun Hyub
AU - An, Joong Hyok
AU - Jeon, Yun Bae
AU - Kim, Yun-Jae
AU - Huh, Yong Hak
PY - 2009/1/1
Y1 - 2009/1/1
N2 - This paper represents the results of tensile test for NiCo thin films, to investigate the size effect on tensile properties. An axial loading tensile tester developed by authors was used to measure the mechanical characteristics of thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry. The "dog-bone" type specimen was designed and fabricated by electroplating process. The 50 and 150μm width of reduced section respectively were designed on 6 in. wafer. The length of reduced section is 1,000μm and the radius of the blending fillet is 1,000μm to minimize a stress concentration of the specimen. The thickness is 10μm. The elastic moduli of NiCo thin film were about 18 ± 4.1GPa for 50μm width and about 148 ± 8.4GPa for 150μm width. The ultimate tensile strength for the width of 50 and 150μm were 2,431±87.8 and 2,348±93.3MPa, respectively. However, the difference between tensile strengths is a little, as 3.3%.
AB - This paper represents the results of tensile test for NiCo thin films, to investigate the size effect on tensile properties. An axial loading tensile tester developed by authors was used to measure the mechanical characteristics of thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry. The "dog-bone" type specimen was designed and fabricated by electroplating process. The 50 and 150μm width of reduced section respectively were designed on 6 in. wafer. The length of reduced section is 1,000μm and the radius of the blending fillet is 1,000μm to minimize a stress concentration of the specimen. The thickness is 10μm. The elastic moduli of NiCo thin film were about 18 ± 4.1GPa for 50μm width and about 148 ± 8.4GPa for 150μm width. The ultimate tensile strength for the width of 50 and 150μm were 2,431±87.8 and 2,348±93.3MPa, respectively. However, the difference between tensile strengths is a little, as 3.3%.
KW - MEMS applications
KW - Micro-tensile stress-strain curves
KW - NiCo thin films
UR - http://www.scopus.com/inward/record.url?scp=84898918608&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84898918608&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84898918608
SP - 93
EP - 102
BT - Engineering Against Fracture - Proceedings of the 1st Conference
PB - Springer Science+Business Media B.V.
ER -