Influences of partial melting and overheating on amorphization of Ge 2Sb 2Te 5 during the reset process

Min Soo Youm, Yong Tae Kim, Man Young Sung

Research output: Contribution to journalReview article

Abstract

It is very important to observe the change in the atomic structure of melt-quenched amorphous Ge 2Sb 2Te 5 (GST) to discover the failure mechanism of phase-change random access memory (PRAM) devices during the reset process. We fabricated the phase-change devices and measured the initial resistance changes with various reset pulse amplitudes. For the observation of the atomic structure changes of GST thin films, we designed the specimens for transmission electron microscopy (TEM) and annealed them below and above the melting temperature of OST (T m = 650 °C) before quenching. The annealed-and-quenched GST at 630 °C has a hexagonal structure with a grain size of about 10 nm after the partial melting. The annealed-and-quenched GST at 750 °C also has a hexagonal structure because of the latent heat. The observed atomic structures of GST are in accordance with the resistance changes inferred from the fabricated edge-contact type of PRAM cell.

Original languageEnglish
Pages (from-to)2657-2661
Number of pages5
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume205
Issue number11
DOIs
Publication statusPublished - 2008 Nov

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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