The performance of microelectromechanical system (MEMS) based fluidic devices was investigated by using the method of infrared thermal velocimetry (ITV). The thermal image obtained from the infrared laser heating of the fluid flowing in a silicon microchannel was recorded for determining the average flow velocity. The ITV method can be used to characterize wide range of channel velocities with an accuracy of ±10%.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)