Infrared thermal velocimetry for nonintrusive flow measurement in silicon microfluidic devices

Jaewon Chung, Costas P. Grigoropoulos, Ralph Greif

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

The performance of microelectromechanical system (MEMS) based fluidic devices was investigated by using the method of infrared thermal velocimetry (ITV). The thermal image obtained from the infrared laser heating of the fluid flowing in a silicon microchannel was recorded for determining the average flow velocity. The ITV method can be used to characterize wide range of channel velocities with an accuracy of ±10%.

Original languageEnglish
Pages (from-to)2911-2917
Number of pages7
JournalReview of Scientific Instruments
Volume74
Issue number5
DOIs
Publication statusPublished - 2003 May

ASJC Scopus subject areas

  • Instrumentation

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