Infrared thermal velocimetry in MEMS-based fluidic devices

Jaewon Chung; Costas P. Grigoropoulos; Ralph Greif

doi:10.1109/JMEMS.2003.811753

Infrared thermal velocimetry in MEMS-based fluidic devices

Jaewon Chung, Costas P. Grigoropoulos, Ralph Greif

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

Most MEMS (microelectromechanical system) devices are made of silicon which is transparent at infrared wave-lengths. Utilizing this infrared transparency of silicon, infrared thermal velocimetry was developed to measure the velocity in MEMS based fluidic devices. The method uses an infrared laser to generate a short heating pulse in a flowing liquid. An infrared camera records the radiative images from the heated flowing liquid and the steady flow velocity is obtained from consecutive radiative images. A wide range of the velocity (1 cm/s^-1 m/s or higher) in silicon (or other materials that are transparent to infrared radiation) microchannels can be measured. Numerical simulations have been carried out and are in good agreement with the experiments. Parametric studies have been carried out for different channel dimensions and laser characteristics.

Original language	English
Pages (from-to)	365-372
Number of pages	8
Journal	Journal of Microelectromechanical Systems
Volume	12
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2003.811753
Publication status	Published - 2003 Jun
Externally published	Yes

Keywords

Diagnostics
Flow measurement
Micro-DPIV
Microfluidic device

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2003.811753

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title = "Infrared thermal velocimetry in MEMS-based fluidic devices",

abstract = "Most MEMS (microelectromechanical system) devices are made of silicon which is transparent at infrared wave-lengths. Utilizing this infrared transparency of silicon, infrared thermal velocimetry was developed to measure the velocity in MEMS based fluidic devices. The method uses an infrared laser to generate a short heating pulse in a flowing liquid. An infrared camera records the radiative images from the heated flowing liquid and the steady flow velocity is obtained from consecutive radiative images. A wide range of the velocity (1 cm/s-1 m/s or higher) in silicon (or other materials that are transparent to infrared radiation) microchannels can be measured. Numerical simulations have been carried out and are in good agreement with the experiments. Parametric studies have been carried out for different channel dimensions and laser characteristics.",

keywords = "Diagnostics, Flow measurement, Micro-DPIV, Microfluidic device",

author = "Jaewon Chung and Grigoropoulos, {Costas P.} and Ralph Greif",

note = "Funding Information: Manuscript received July 17, 2002; revised December 10, 2002. This work was supported by the Defense Advanced Research Projects Agency (DARPA) under the HERETIC program. Subject Editor W. N. Sharpe, Jr. The authors are with the Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740 USA (e-mail: cgrigoro@me. berkeley.edu). Digital Object Identifier 10.1109/JMEMS.2003.811753",

year = "2003",

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doi = "10.1109/JMEMS.2003.811753",

language = "English",

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AU - Chung, Jaewon

AU - Grigoropoulos, Costas P.

AU - Greif, Ralph

N1 - Funding Information: Manuscript received July 17, 2002; revised December 10, 2002. This work was supported by the Defense Advanced Research Projects Agency (DARPA) under the HERETIC program. Subject Editor W. N. Sharpe, Jr. The authors are with the Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740 USA (e-mail: cgrigoro@me. berkeley.edu). Digital Object Identifier 10.1109/JMEMS.2003.811753

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N2 - Most MEMS (microelectromechanical system) devices are made of silicon which is transparent at infrared wave-lengths. Utilizing this infrared transparency of silicon, infrared thermal velocimetry was developed to measure the velocity in MEMS based fluidic devices. The method uses an infrared laser to generate a short heating pulse in a flowing liquid. An infrared camera records the radiative images from the heated flowing liquid and the steady flow velocity is obtained from consecutive radiative images. A wide range of the velocity (1 cm/s-1 m/s or higher) in silicon (or other materials that are transparent to infrared radiation) microchannels can be measured. Numerical simulations have been carried out and are in good agreement with the experiments. Parametric studies have been carried out for different channel dimensions and laser characteristics.

AB - Most MEMS (microelectromechanical system) devices are made of silicon which is transparent at infrared wave-lengths. Utilizing this infrared transparency of silicon, infrared thermal velocimetry was developed to measure the velocity in MEMS based fluidic devices. The method uses an infrared laser to generate a short heating pulse in a flowing liquid. An infrared camera records the radiative images from the heated flowing liquid and the steady flow velocity is obtained from consecutive radiative images. A wide range of the velocity (1 cm/s-1 m/s or higher) in silicon (or other materials that are transparent to infrared radiation) microchannels can be measured. Numerical simulations have been carried out and are in good agreement with the experiments. Parametric studies have been carried out for different channel dimensions and laser characteristics.

KW - Diagnostics

KW - Flow measurement

KW - Micro-DPIV

KW - Microfluidic device

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JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 3

ER -

Infrared thermal velocimetry in MEMS-based fluidic devices

Abstract

Keywords

ASJC Scopus subject areas

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