Abstract
Most MEMS (microelectromechanical system) devices are made of silicon which is transparent at infrared wave-lengths. Utilizing this infrared transparency of silicon, infrared thermal velocimetry was developed to measure the velocity in MEMS based fluidic devices. The method uses an infrared laser to generate a short heating pulse in a flowing liquid. An infrared camera records the radiative images from the heated flowing liquid and the steady flow velocity is obtained from consecutive radiative images. A wide range of the velocity (1 cm/s-1 m/s or higher) in silicon (or other materials that are transparent to infrared radiation) microchannels can be measured. Numerical simulations have been carried out and are in good agreement with the experiments. Parametric studies have been carried out for different channel dimensions and laser characteristics.
| Original language | English |
|---|---|
| Pages (from-to) | 365-372 |
| Number of pages | 8 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 12 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2003 Jun 1 |
| Externally published | Yes |
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Keywords
- Diagnostics
- Flow measurement
- Micro-DPIV
- Microfluidic device
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
Infrared thermal velocimetry in MEMS-based fluidic devices. / Chung, Jaewon; Grigoropoulos, Costas P.; Greif, Ralph.
In: Journal of Microelectromechanical Systems, Vol. 12, No. 3, 01.06.2003, p. 365-372.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Infrared thermal velocimetry in MEMS-based fluidic devices
AU - Chung, Jaewon
AU - Grigoropoulos, Costas P.
AU - Greif, Ralph
PY - 2003/6/1
Y1 - 2003/6/1
N2 - Most MEMS (microelectromechanical system) devices are made of silicon which is transparent at infrared wave-lengths. Utilizing this infrared transparency of silicon, infrared thermal velocimetry was developed to measure the velocity in MEMS based fluidic devices. The method uses an infrared laser to generate a short heating pulse in a flowing liquid. An infrared camera records the radiative images from the heated flowing liquid and the steady flow velocity is obtained from consecutive radiative images. A wide range of the velocity (1 cm/s-1 m/s or higher) in silicon (or other materials that are transparent to infrared radiation) microchannels can be measured. Numerical simulations have been carried out and are in good agreement with the experiments. Parametric studies have been carried out for different channel dimensions and laser characteristics.
AB - Most MEMS (microelectromechanical system) devices are made of silicon which is transparent at infrared wave-lengths. Utilizing this infrared transparency of silicon, infrared thermal velocimetry was developed to measure the velocity in MEMS based fluidic devices. The method uses an infrared laser to generate a short heating pulse in a flowing liquid. An infrared camera records the radiative images from the heated flowing liquid and the steady flow velocity is obtained from consecutive radiative images. A wide range of the velocity (1 cm/s-1 m/s or higher) in silicon (or other materials that are transparent to infrared radiation) microchannels can be measured. Numerical simulations have been carried out and are in good agreement with the experiments. Parametric studies have been carried out for different channel dimensions and laser characteristics.
KW - Diagnostics
KW - Flow measurement
KW - Micro-DPIV
KW - Microfluidic device
UR - http://www.scopus.com/inward/record.url?scp=0038208389&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0038208389&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2003.811753
DO - 10.1109/JMEMS.2003.811753
M3 - Article
VL - 12
SP - 365
EP - 372
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 3
ER -