Infrared thermal velocimetry in MEMS-based fluidic devices

Jaewon Chung, Costas P. Grigoropoulos, Ralph Greif

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

Most MEMS (microelectromechanical system) devices are made of silicon which is transparent at infrared wave-lengths. Utilizing this infrared transparency of silicon, infrared thermal velocimetry was developed to measure the velocity in MEMS based fluidic devices. The method uses an infrared laser to generate a short heating pulse in a flowing liquid. An infrared camera records the radiative images from the heated flowing liquid and the steady flow velocity is obtained from consecutive radiative images. A wide range of the velocity (1 cm/s-1 m/s or higher) in silicon (or other materials that are transparent to infrared radiation) microchannels can be measured. Numerical simulations have been carried out and are in good agreement with the experiments. Parametric studies have been carried out for different channel dimensions and laser characteristics.

Original languageEnglish
Pages (from-to)365-372
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume12
Issue number3
DOIs
Publication statusPublished - 2003 Jun 1
Externally publishedYes

Fingerprint

Fluidic devices
Velocity measurement
MEMS
Infrared radiation
Silicon
Infrared lasers
Liquids
Steady flow
Microchannels
Flow velocity
Transparency
Laser pulses
Cameras
Hot Temperature
Heating
Wavelength
Lasers
Computer simulation
Experiments

Keywords

  • Diagnostics
  • Flow measurement
  • Micro-DPIV
  • Microfluidic device

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Infrared thermal velocimetry in MEMS-based fluidic devices. / Chung, Jaewon; Grigoropoulos, Costas P.; Greif, Ralph.

In: Journal of Microelectromechanical Systems, Vol. 12, No. 3, 01.06.2003, p. 365-372.

Research output: Contribution to journalArticle

Chung, Jaewon ; Grigoropoulos, Costas P. ; Greif, Ralph. / Infrared thermal velocimetry in MEMS-based fluidic devices. In: Journal of Microelectromechanical Systems. 2003 ; Vol. 12, No. 3. pp. 365-372.
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