Infrared vision using uncooled micro-optomechanical camera

T. Perazzo, M. Mao, Oh Myoung Kwon, A. Majumdar, J. B. Varesi, P. Norton

Research output: Contribution to journalArticle

109 Citations (Scopus)

Abstract

The fabrication, design, and imaging results of an uncooled infrared (IR) camera that contains a focal plane array of bimaterial microcantilever sensors, and an optical readout method that measures cantilever deflections in the nanometer range to directly project a visible image of the IR scene on the human eye or a visible camera are presented. The results suggests that objects at temperatures as low as 100 °C can be imaged with the best noise-equivalent temperature difference (NEΔT) in the range of 10 K. It is estimated that further improvements that are currently being pursued can improve NEΔT to about 50 mK.

Original languageEnglish
Pages (from-to)3567-3569
Number of pages3
JournalApplied Physics Letters
Volume74
Issue number23
Publication statusPublished - 1999 Jun 7
Externally publishedYes

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temperature gradients
cameras
focal plane devices
readout
deflection
fabrication
sensors
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Perazzo, T., Mao, M., Kwon, O. M., Majumdar, A., Varesi, J. B., & Norton, P. (1999). Infrared vision using uncooled micro-optomechanical camera. Applied Physics Letters, 74(23), 3567-3569.

Infrared vision using uncooled micro-optomechanical camera. / Perazzo, T.; Mao, M.; Kwon, Oh Myoung; Majumdar, A.; Varesi, J. B.; Norton, P.

In: Applied Physics Letters, Vol. 74, No. 23, 07.06.1999, p. 3567-3569.

Research output: Contribution to journalArticle

Perazzo, T, Mao, M, Kwon, OM, Majumdar, A, Varesi, JB & Norton, P 1999, 'Infrared vision using uncooled micro-optomechanical camera', Applied Physics Letters, vol. 74, no. 23, pp. 3567-3569.
Perazzo T, Mao M, Kwon OM, Majumdar A, Varesi JB, Norton P. Infrared vision using uncooled micro-optomechanical camera. Applied Physics Letters. 1999 Jun 7;74(23):3567-3569.
Perazzo, T. ; Mao, M. ; Kwon, Oh Myoung ; Majumdar, A. ; Varesi, J. B. ; Norton, P. / Infrared vision using uncooled micro-optomechanical camera. In: Applied Physics Letters. 1999 ; Vol. 74, No. 23. pp. 3567-3569.
@article{fe879b07ecc24a95a13e9ccd16aa67c1,
title = "Infrared vision using uncooled micro-optomechanical camera",
abstract = "The fabrication, design, and imaging results of an uncooled infrared (IR) camera that contains a focal plane array of bimaterial microcantilever sensors, and an optical readout method that measures cantilever deflections in the nanometer range to directly project a visible image of the IR scene on the human eye or a visible camera are presented. The results suggests that objects at temperatures as low as 100 °C can be imaged with the best noise-equivalent temperature difference (NEΔT) in the range of 10 K. It is estimated that further improvements that are currently being pursued can improve NEΔT to about 50 mK.",
author = "T. Perazzo and M. Mao and Kwon, {Oh Myoung} and A. Majumdar and Varesi, {J. B.} and P. Norton",
year = "1999",
month = "6",
day = "7",
language = "English",
volume = "74",
pages = "3567--3569",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "23",

}

TY - JOUR

T1 - Infrared vision using uncooled micro-optomechanical camera

AU - Perazzo, T.

AU - Mao, M.

AU - Kwon, Oh Myoung

AU - Majumdar, A.

AU - Varesi, J. B.

AU - Norton, P.

PY - 1999/6/7

Y1 - 1999/6/7

N2 - The fabrication, design, and imaging results of an uncooled infrared (IR) camera that contains a focal plane array of bimaterial microcantilever sensors, and an optical readout method that measures cantilever deflections in the nanometer range to directly project a visible image of the IR scene on the human eye or a visible camera are presented. The results suggests that objects at temperatures as low as 100 °C can be imaged with the best noise-equivalent temperature difference (NEΔT) in the range of 10 K. It is estimated that further improvements that are currently being pursued can improve NEΔT to about 50 mK.

AB - The fabrication, design, and imaging results of an uncooled infrared (IR) camera that contains a focal plane array of bimaterial microcantilever sensors, and an optical readout method that measures cantilever deflections in the nanometer range to directly project a visible image of the IR scene on the human eye or a visible camera are presented. The results suggests that objects at temperatures as low as 100 °C can be imaged with the best noise-equivalent temperature difference (NEΔT) in the range of 10 K. It is estimated that further improvements that are currently being pursued can improve NEΔT to about 50 mK.

UR - http://www.scopus.com/inward/record.url?scp=0032614109&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032614109&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0032614109

VL - 74

SP - 3567

EP - 3569

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 23

ER -