Infrared vision using uncooled optomechanical camera

A. Majumdar, M. Mao, T. Perazzo, Y. Zhao, Oh Myoung Kwon, J. Varesi, P. Norton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

An uncooled infrared (IR) imaging system that is based on thermomechanical sensing of IR radiation in conjunction with a visible optical readout has been developed. The system contains a focal plane array (FPA) consisting of bimaterial cantilever beams made of silicon nitride (SiN x) and gold (Au) in each pixel. Absorption of incident IR radiation in the 8-14 μm wavelength range by SiN x in each cantilever beam raises its temperature, resulting in proportional deflection due to mismatch in thermal expansion of the two cantilever materials. The FPA design involved maximizing the thermal resistance between the pixel and its surroundings, maximizing the thermomechanical response within the constraints of the pixel size, optimizing the pixel time response, and maximizing the IR absorption using thin film optics. Microfabrication of stress-balanced bimaterial cantilevers was achieved by varying the silicon concentration along the thickness of the SiN x films in order to balance the residual tensile stress in the Au film and the Cr adhesion layer between Au and SiN x. The optical readout utilized Fourier diffractive optics to simultaneously detect deflections of all cantilevers using a single light source. The results suggest that objects at temperatures as low as 30 °C can be imaged with the best noise-equivalent temperature difference (NETD) in the range of 2-5 K. It is estimated that further improvements that are currently being pursued can improve NETD below 5 mK.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages74-79
Number of pages6
Volume3948
Publication statusPublished - 2000
Externally publishedYes
EventPhotodetectors: Materials and Devices V - San Jose, CA, USA
Duration: 2000 Jan 252000 Jan 28

Other

OtherPhotodetectors: Materials and Devices V
CitySan Jose, CA, USA
Period00/1/2500/1/28

Fingerprint

Pixels
Cameras
pixels
cameras
Infrared radiation
Focal plane arrays
cantilever beams
infrared radiation
Cantilever beams
focal plane devices
readout
deflection
temperature gradients
Fourier optics
Deflection (structures)
Diffractive optics
diffractive optics
Temperature
time response
Microfabrication

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Majumdar, A., Mao, M., Perazzo, T., Zhao, Y., Kwon, O. M., Varesi, J., & Norton, P. (2000). Infrared vision using uncooled optomechanical camera. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3948, pp. 74-79). Society of Photo-Optical Instrumentation Engineers.

Infrared vision using uncooled optomechanical camera. / Majumdar, A.; Mao, M.; Perazzo, T.; Zhao, Y.; Kwon, Oh Myoung; Varesi, J.; Norton, P.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3948 Society of Photo-Optical Instrumentation Engineers, 2000. p. 74-79.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Majumdar, A, Mao, M, Perazzo, T, Zhao, Y, Kwon, OM, Varesi, J & Norton, P 2000, Infrared vision using uncooled optomechanical camera. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3948, Society of Photo-Optical Instrumentation Engineers, pp. 74-79, Photodetectors: Materials and Devices V, San Jose, CA, USA, 00/1/25.
Majumdar A, Mao M, Perazzo T, Zhao Y, Kwon OM, Varesi J et al. Infrared vision using uncooled optomechanical camera. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3948. Society of Photo-Optical Instrumentation Engineers. 2000. p. 74-79
Majumdar, A. ; Mao, M. ; Perazzo, T. ; Zhao, Y. ; Kwon, Oh Myoung ; Varesi, J. ; Norton, P. / Infrared vision using uncooled optomechanical camera. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3948 Society of Photo-Optical Instrumentation Engineers, 2000. pp. 74-79
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