InGaN/GaN light emitting diodes grown on nanoimprint-based hollow-patterned sapphire substrates

Young Hoon Sung, Jaemin Park, Eun Seo Choi, Tae Hoon Chung, Tae Won Lee, Hee Jun Kim, Jeong Min Baik, Heon Lee

Research output: Contribution to journalArticle

Abstract

In this study, conical-shaped hollow-patterned sapphire substrates (HPSSs) with three different sizes, were fabricated and used as substrates for blue light emitting diode (LED). The HPSSs were fabricated on 2-inch diameter sapphire wafers by nanoimprint technique. Blue LED structures were grown on the HPSS and flat sapphire wafer, in order to investigate the effect of hollow patterns on sapphire substrate. The photoluminescence (PL), electroluminescence (EL) and X-ray diffraction analysis were used to characterize the blue LED structures. Luminescence efficiency of LED structure, grown on HPSS wafer was improved, compared to identical LED structure grown on conventional flat sapphire wafer. 4.5 times stronger PL and 1.7 times stronger EL intensities were observed from GaN based LED structures grown on HPSS.

Original languageEnglish
Article number111082
JournalMicroelectronic Engineering
Volume216
DOIs
Publication statusPublished - 2019 Aug 15

Fingerprint

Aluminum Oxide
Sapphire
Light emitting diodes
hollow
sapphire
light emitting diodes
Substrates
wafers
Electroluminescence
electroluminescence
Photoluminescence
photoluminescence
X ray diffraction analysis
Luminescence
luminescence

Keywords

  • Hollow LEDs
  • Hollow pattern
  • Light emitting diode
  • Micro LEDs
  • Nano imprint

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

InGaN/GaN light emitting diodes grown on nanoimprint-based hollow-patterned sapphire substrates. / Sung, Young Hoon; Park, Jaemin; Choi, Eun Seo; Chung, Tae Hoon; Lee, Tae Won; Kim, Hee Jun; Baik, Jeong Min; Lee, Heon.

In: Microelectronic Engineering, Vol. 216, 111082, 15.08.2019.

Research output: Contribution to journalArticle

Sung, Young Hoon ; Park, Jaemin ; Choi, Eun Seo ; Chung, Tae Hoon ; Lee, Tae Won ; Kim, Hee Jun ; Baik, Jeong Min ; Lee, Heon. / InGaN/GaN light emitting diodes grown on nanoimprint-based hollow-patterned sapphire substrates. In: Microelectronic Engineering. 2019 ; Vol. 216.
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AU - Lee, Tae Won

AU - Kim, Hee Jun

AU - Baik, Jeong Min

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