Insights into the reactive ion etching mechanism of nanocrystalline diamond films as a function of film microstructure and the presence of fluorine gas

Ju Heon Yoon, Wook Seong Lee, Jong Keuk Park, Gyu Weon Hwang, Young Joon Baik, Tae Yeon Seong, Jeung Hyun Jeong

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Physics & Astronomy