Integrated planar spiral inductors with CoFe and NiFe ferromagnetic layer

Gyoungbum Kim; Seung Yong Cha; Eun Kyung Hyun; Youngchai Jung; Yoonsuk Choi; Jae Sung Rieh; Seong Rae Lee; Sungwoo Hwang

doi:10.1002/mop.23180

Integrated planar spiral inductors with CoFe and NiFe ferromagnetic layer

Gyoungbum Kim, Seung Yong Cha, Eun Kyung Hyun, Youngchai Jung, Yoonsuk Choi, Jae Sung Rieh, Seong Rae Lee, Sungwoo Hwang

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

Inductance increase up to 28% was obtained for on-chip spiral inductors by employing DC-sputtered CoFe and NiFe ferromagnetic (FM) layer on top of the spirals. It was also observed that slitpatterned FM layers exhibited better quality factors than blanket FM layers, leading to values comparable to that of the inductors without FM layer.

Original language	English
Pages (from-to)	676-678
Number of pages	3
Journal	Microwave and Optical Technology Letters
Volume	50
Issue number	3
DOIs	https://doi.org/10.1002/mop.23180
Publication status	Published - 2008 Mar

Keywords

Ferromagnetic materials
Ferromagnetic spiral inductor
Inductance
Quality factor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1002/mop.23180

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abstract = "Inductance increase up to 28% was obtained for on-chip spiral inductors by employing DC-sputtered CoFe and NiFe ferromagnetic (FM) layer on top of the spirals. It was also observed that slitpatterned FM layers exhibited better quality factors than blanket FM layers, leading to values comparable to that of the inductors without FM layer.",

keywords = "Ferromagnetic materials, Ferromagnetic spiral inductor, Inductance, Quality factor",

author = "Gyoungbum Kim and Cha, {Seung Yong} and Hyun, {Eun Kyung} and Youngchai Jung and Yoonsuk Choi and Rieh, {Jae Sung} and Lee, {Seong Rae} and Sungwoo Hwang",

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T1 - Integrated planar spiral inductors with CoFe and NiFe ferromagnetic layer

AU - Kim, Gyoungbum

AU - Cha, Seung Yong

AU - Hyun, Eun Kyung

AU - Jung, Youngchai

AU - Choi, Yoonsuk

AU - Rieh, Jae Sung

AU - Lee, Seong Rae

AU - Hwang, Sungwoo

PY - 2008/3

Y1 - 2008/3

N2 - Inductance increase up to 28% was obtained for on-chip spiral inductors by employing DC-sputtered CoFe and NiFe ferromagnetic (FM) layer on top of the spirals. It was also observed that slitpatterned FM layers exhibited better quality factors than blanket FM layers, leading to values comparable to that of the inductors without FM layer.

AB - Inductance increase up to 28% was obtained for on-chip spiral inductors by employing DC-sputtered CoFe and NiFe ferromagnetic (FM) layer on top of the spirals. It was also observed that slitpatterned FM layers exhibited better quality factors than blanket FM layers, leading to values comparable to that of the inductors without FM layer.

KW - Ferromagnetic materials

KW - Ferromagnetic spiral inductor

KW - Inductance

KW - Quality factor

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