Integrated planar spiral inductors with CoFe and NiFe ferromagnetic layer

Gyoungbum Kim, Seung Yong Cha, Eun Kyung Hyun, Youngchai Jung, Yoonsuk Choi, Jae-Sung Rieh, Seong Rae Lee, Sungwoo Hwang

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Inductance increase up to 28% was obtained for on-chip spiral inductors by employing DC-sputtered CoFe and NiFe ferromagnetic (FM) layer on top of the spirals. It was also observed that slitpatterned FM layers exhibited better quality factors than blanket FM layers, leading to values comparable to that of the inductors without FM layer.

Original languageEnglish
Pages (from-to)676-678
Number of pages3
JournalMicrowave and Optical Technology Letters
Volume50
Issue number3
DOIs
Publication statusPublished - 2008 Mar 1

Keywords

  • Ferromagnetic materials
  • Ferromagnetic spiral inductor
  • Inductance
  • Quality factor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

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