Inductance increase up to 28% was obtained for on-chip spiral inductors by employing DC-sputtered CoFe and NiFe ferromagnetic (FM) layer on top of the spirals. It was also observed that slitpatterned FM layers exhibited better quality factors than blanket FM layers, leading to values comparable to that of the inductors without FM layer.
- Ferromagnetic materials
- Ferromagnetic spiral inductor
- Quality factor
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Atomic and Molecular Physics, and Optics