Investigation of Cu metallization for Si solar cells

Jinmo Kang, Jae Sung You, Choon Sik Kang, James Jungho Pak, Donghwan Kim

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

For application of copper metallization to silicon solar cells, electrical resistivity of the electroplated Cu was investigated for different annealing conditions: the rapid thermal annealing (RTA) and the vacuum annealing at various temperatures. The characteristics of Ti as the diffusion barrier were also observed. The specific contact resistance between Si and Ti/Cu was measured using Kelvin test pattern. For 8-min electroplated sample, the lowest resistivity of 2.1 μΩcm was obtained at 300°C RTA condition. For Cu with Ti barrier, 400°C 2 min vacuum-annealed sample showed etch pits whereas 400°C RTA showed no etch pits. A vacuum annealing at 450°C for 30 min reduced the specific contact resistance to 7.2 × 10-6 Ωcm2.

Original languageEnglish
Pages (from-to)91-96
Number of pages6
JournalSolar Energy Materials and Solar Cells
Volume74
Issue number1-4
DOIs
Publication statusPublished - 2002 Oct

Keywords

  • Contact resistance
  • Cu metallization
  • Etch pits
  • High efficiency
  • Silicon
  • Solar cells

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films

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