Abstract
Schottky barrier height (SBH; ΦB) and their dependence on the work function of metals (ΦM) at semipolar (11-22) p-GaN surfaces were investigated using Schottky diodes fabricated with different metals. The SBH increased with temperature, whereas the ideality factor decreased. This behavior was explained by means of the barrier inhomogeneity model, giving the mean barrier heights of 1.93-2.05 eV for different metals. The S-parameter (dΦB/dΦM) was obtained to be 0.04. This small S-parameter implies that the surface Fermi level is nearly perfectly pinned at deep-level states (caused by vacancy-related and/or Mg-induced defects) located at 1.98 eV above the valence band. This finding indicates that the surface modification is essentially required for the formation of high-quality ohmic and/or Schottky contacts.
Original language | English |
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Pages (from-to) | 76-81 |
Number of pages | 6 |
Journal | Superlattices and Microstructures |
Volume | 77 |
DOIs | |
Publication status | Published - 2015 Mar |
Keywords
- Barrier inhomogeneity model
- Schottky contacts
- Semipolar GaN
- Surface states
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Electrical and Electronic Engineering