Investigation of the layout and optical proximity correction effects to control the trench etching process on 4H-SiC

Sinsu Kyoung, Eun Sik Jung, Man Young Sung

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Although trench gate and super-junction technology have micro-trench problems when applied to the SiC process due to the material characteristics. In this paper, area effects are analyzed from the test element group with various patterns and optical proximity correction (OPC) methods are proposed and analyzed to reduce micro-trenches in the SiC trench etching process. First, the loading effects were analyzed from pattern samples with various trench widths (Wt). From experiments, the area must limited under a proper size for a uniform etching profile and reduced micro-trenches because a wider area accelerates the etch rate. Second, the area effects were more severely unbalanced at corner patterns because the corner pattern necessarily has an in-corner and out-corner that have different etching areas to each other. We can balance areas using OPC patterns to overcome this. Experiments with OPC represented improved micro-trench profile from when comparing differences of trench depth (Δdt) at out corner and in corner. As a result, the area effects can be used to improve the trench profile with optimized etching process conditions. Therefore, the trench gate and super-junction pillar of the SiC power MOSFET can have an improved uniform profile without micro-trenches using proper design and OPC.[Figure not available: see fulltext.].

Original languageEnglish
Pages (from-to)368-372
Number of pages5
JournalElectronic Materials Letters
Volume13
Issue number4
DOIs
Publication statusPublished - 2017 Jul 1

Keywords

  • 4H-SiC trench etching
  • area effect
  • loading effect
  • micro-trench
  • OPC
  • RIE lagging

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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