Investigation on fabrication of nanoscale patterns using laser interference lithography

Jinnil Choi, Myung Ho Chung, Ki Young Dong, Eun Mi Park, Dae Jin Ham, Yunkwon Park, In Sang Song, James Jungho Pak, Byeong Kwon Ju

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

Nanoscale patterns are fabricated by laser interference lithography (LIL) using Lloyd's mirror interferometer. LIL provides a patterning technology with simple, quick process over a large area without the usage of a mask. Effects of various key parameters for LIL, with 257 nm wavelength laser, are investigated, such as the exposure dosage, the half angle of two incident beams at the intersection, and the power of the light source for generating one or two dimensional (line and dot) nanoscale structures. The uniform dot patterns over an area of 20 mm×20 mm with the half pitch sizes of around 190,250, and 370 nm are achieved and by increasing the beam power up to 0.600 mW/cm 2, the exposure process time was reduced down to 12/12 sec for the positive photoresist DHK-BF424 (DongJin) over a bare silicon substrate. In addition, bottom anti-reflective coating (DUV-30J, Brewer Science) is applied to confirm improvements for line structures. The advantages and limitations of LIL are highlighted for generating nanoscale patterns.

Original languageEnglish
Pages (from-to)778-781
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume11
Issue number1
DOIs
Publication statusPublished - 2011 Jan 1

Fingerprint

Lithography
Lasers
lithography
interference
Fabrication
fabrication
lasers
Reflective coatings
Electric Power Supplies
Silicon
Photoresists
Masks
photoresists
Interferometers
intersections
Light sources
light sources
Mirrors
masks
interferometers

Keywords

  • Laser interference lithography
  • Nano-fabrication
  • Nanoscale patterns

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Chemistry(all)
  • Materials Science(all)
  • Bioengineering
  • Biomedical Engineering

Cite this

Investigation on fabrication of nanoscale patterns using laser interference lithography. / Choi, Jinnil; Chung, Myung Ho; Dong, Ki Young; Park, Eun Mi; Ham, Dae Jin; Park, Yunkwon; Song, In Sang; Pak, James Jungho; Ju, Byeong Kwon.

In: Journal of Nanoscience and Nanotechnology, Vol. 11, No. 1, 01.01.2011, p. 778-781.

Research output: Contribution to journalArticle

Choi, Jinnil ; Chung, Myung Ho ; Dong, Ki Young ; Park, Eun Mi ; Ham, Dae Jin ; Park, Yunkwon ; Song, In Sang ; Pak, James Jungho ; Ju, Byeong Kwon. / Investigation on fabrication of nanoscale patterns using laser interference lithography. In: Journal of Nanoscience and Nanotechnology. 2011 ; Vol. 11, No. 1. pp. 778-781.
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