Investigation on the electrical properties of the Ba2 Ti9 O20 thin films for metal-insulator-metal capacitor application

J. B. Lim, Y. H. Jeong, K. P. Hong, Sahn Nahm, H. J. Sun, H. J. Lee

Research output: Contribution to journalArticle

Abstract

Homogeneous crystalline Ba2 Ti9 O20 (BT) phase was formed for the films grown at 700 and annealed at 900°C. However, BaTi5 O11 second phase was also developed for the films grown at temperatures lower than 700°C and annealed at 900°C. A high capacitance density of 6.1 fFμ m2 along with a leakage current density of 3.1× 10-8 A cm2 at 1.0 V were obtained for a 61 nm thick crystalline BT film. This film had small quadratic and linear voltage coefficients of capacitance (VCC) of -48.5 ppm V2 and 534 ppmV, respectively, and a small temperature coefficient of capacitance (TCC) of -465 ppm°C at 100 kHz. A 62 nm thick amorphous BT film grown at 300°C showed a high capacitance density of 5.5 fFμ m2 with a very low leakage current density of 0.59× 10-9 A cm2 at 2.0 V. This amorphous film also showed small quadratic and linear VCCs of 99.7 ppm V2 and 371 ppmV, respectively, with a low TCC of 661 ppm°C at 100 kHz. These results demonstrate that BT films, particularly amorphous BT films, are good candidate materials for metal-insulator-metal capacitors.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume154
Issue number5
DOIs
Publication statusPublished - 2007 Apr 10

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capacitors
Electric properties
Capacitors
Metals
electrical properties
insulators
Capacitance
Thin films
thin films
capacitance
metals
Amorphous films
Leakage currents
Current density
Crystalline materials
leakage
coefficients
current density
Temperature
Electric potential

ASJC Scopus subject areas

  • Electrochemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Investigation on the electrical properties of the Ba2 Ti9 O20 thin films for metal-insulator-metal capacitor application. / Lim, J. B.; Jeong, Y. H.; Hong, K. P.; Nahm, Sahn; Sun, H. J.; Lee, H. J.

In: Journal of the Electrochemical Society, Vol. 154, No. 5, 10.04.2007.

Research output: Contribution to journalArticle

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AU - Nahm, Sahn

AU - Sun, H. J.

AU - Lee, H. J.

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