Ion conduction in nanoscale yttria-stabilized zirconia fabricated by atomic layer deposition with various doping rates

Kyung Sik Son, Kiho Bae, Jun Woo Kim, Jeong Sook Ha, Joon Hyung Shim

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

The ion conduction of yttria-stabilized zirconia (YSZ) was studied by varying the doping ratios during atomic layer deposition (ALD). The ALD cycle ratio for the yttria and zirconia depositions was varied from 1:1 to 1:6, which corresponded to the doping ratios from 28.8% to 4.3%. The in-plane conductivity of ALD YSZ was enhanced by up to 2 orders of magnitude; the optimal ALD doping ratio (10.4%) was found to differ from that of bulk YSZ (8%). This different relationship between the doping ratio and the ion conduction for ALD YSZ versus bulk YSZ is due to the inhomogeneous doping in the vertical direction of the ALD YSZ films, as opposed to the homogenous doping of bulk YSZ.

Original languageEnglish
Article number01A107
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume31
Issue number1
DOIs
Publication statusPublished - 2013 Jan 1

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Atomic layer deposition
Yttria stabilized zirconia
atomic layer epitaxy
yttria-stabilized zirconia
Doping (additives)
Ions
conduction
ions
Yttrium oxide
zirconium oxides
Zirconia
conductivity
cycles

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

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abstract = "The ion conduction of yttria-stabilized zirconia (YSZ) was studied by varying the doping ratios during atomic layer deposition (ALD). The ALD cycle ratio for the yttria and zirconia depositions was varied from 1:1 to 1:6, which corresponded to the doping ratios from 28.8{\%} to 4.3{\%}. The in-plane conductivity of ALD YSZ was enhanced by up to 2 orders of magnitude; the optimal ALD doping ratio (10.4{\%}) was found to differ from that of bulk YSZ (8{\%}). This different relationship between the doping ratio and the ion conduction for ALD YSZ versus bulk YSZ is due to the inhomogeneous doping in the vertical direction of the ALD YSZ films, as opposed to the homogenous doping of bulk YSZ.",
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AU - Sik Son, Kyung

AU - Bae, Kiho

AU - Woo Kim, Jun

AU - Ha, Jeong Sook

AU - Shim, Joon Hyung

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