ITO/Ag/ITO multilayer-based transparent conductive electrodes for ultraviolet light-emitting diodes

Jae Hoon Lee, Kie Young Woo, Kyeong Heon Kim, Hee Dong Kim, Tae Geun Kim

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

ITO/Ag/ITO (IAI) multilayer-based transparent conductive electrodes for ultraviolet light-emitting diodes are fabricated by reactive sputtering, optimized by annealing, and characterized with respect to electrical and optical properties. Increasing the annealing temperature from 300°C to 500°C decreased the sheet resistance and increased the transmittance. This may result from an observed improvement in the crystallinity of the IAI multilayer and a reduction in the near-UV absorption coefficient of Ag. We observed the lowest sheet resistance (9.21 Ω/sq) and the highest optical transmittance (88%) at 380 nm for the IAI multilayer samples annealed in N2 gas at 500°C.

Original languageEnglish
Pages (from-to)5055-5058
Number of pages4
JournalOptics Letters
Volume38
Issue number23
DOIs
Publication statusPublished - 2013 Dec 1

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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