Large-area printed broadband membrane reflectors by laser interference lithography

Jung Hun Seo, Jung ho Park, Deyin Zhao, Hongjun Yang, Weidong Zhou, Byeong Kwon Ju, Zhenqiang Ma

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

We report here large-area broadband photonic crystal membrane reflectors (MRs) on glass substrates based on laser interference lithography (LIL) patterning and elastic stamp membrane transfer printing techniques. High-reflectivity broadband MRs on glass were realized with measured reflectivity of 95% around 1300 nm and a bandwidth of about 100 nm. Large-area nanopattern uniformity was experimentally verified with measured reflectivity from multiple locations of the large-area MRs. The work could lead to fabrication of the large-area high-performance MR at low cost with high throughput. The reflectors can be used in many types of optoelectronic and photonic devices.

Original languageEnglish
Article number6449313
JournalIEEE Photonics Journal
Volume5
Issue number1
DOIs
Publication statusPublished - 2013 Feb 18

Keywords

  • Broadband membrane reflectors (MRs)
  • Laser interference lithography (LIL)
  • Silicon nanomembrane
  • Transfer printing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

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