Large-area printed broadband membrane reflectors by laser interference lithography

Jung Hun Seo, Jung ho Park, Deyin Zhao, Hongjun Yang, Weidong Zhou, Byeong Kwon Ju, Zhenqiang Ma

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

We report here large-area broadband photonic crystal membrane reflectors (MRs) on glass substrates based on laser interference lithography (LIL) patterning and elastic stamp membrane transfer printing techniques. High-reflectivity broadband MRs on glass were realized with measured reflectivity of 95% around 1300 nm and a bandwidth of about 100 nm. Large-area nanopattern uniformity was experimentally verified with measured reflectivity from multiple locations of the large-area MRs. The work could lead to fabrication of the large-area high-performance MR at low cost with high throughput. The reflectors can be used in many types of optoelectronic and photonic devices.

Original languageEnglish
Article number6449313
JournalIEEE Photonics Journal
Volume5
Issue number1
DOIs
Publication statusPublished - 2013 Feb 18

Fingerprint

Lithography
reflectors
lithography
membranes
broadband
Membranes
interference
Lasers
lasers
reflectance
photonics
Glass
Photonic devices
glass
optoelectronic devices
Photonic crystals
printing
Optoelectronic devices
Printing
Throughput

Keywords

  • Broadband membrane reflectors (MRs)
  • Laser interference lithography (LIL)
  • Silicon nanomembrane
  • Transfer printing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

Cite this

Large-area printed broadband membrane reflectors by laser interference lithography. / Seo, Jung Hun; Park, Jung ho; Zhao, Deyin; Yang, Hongjun; Zhou, Weidong; Ju, Byeong Kwon; Ma, Zhenqiang.

In: IEEE Photonics Journal, Vol. 5, No. 1, 6449313, 18.02.2013.

Research output: Contribution to journalArticle

Seo, Jung Hun ; Park, Jung ho ; Zhao, Deyin ; Yang, Hongjun ; Zhou, Weidong ; Ju, Byeong Kwon ; Ma, Zhenqiang. / Large-area printed broadband membrane reflectors by laser interference lithography. In: IEEE Photonics Journal. 2013 ; Vol. 5, No. 1.
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