Large-area, scalable fabrication of conical TiN/GST/TiN nanoarray for low-power phase change memory

Jong Moon Yoon, Hu Young Jeong, Sung Hoon Hong, You Yin, Hyoung Seok Moon, Seong Jun Jeong, Jun Hee Han, Yong In Kim, Yong Tae Kim, Heon Lee, Sang Ouk Kim, Jeong Yong Lee

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Engineering & Materials Science