Large-area synthesis of monolayer MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition

Yu Zhao, Hyunjea Lee, Woong Choi, Weidong Fei, Cheol Jin Lee

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

We report the synthesis of large-scale continuous MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition (CVD). As-grown thin films were composed of a continuous monolayer of MoSe2 and extended up to a millimeter scale. The CVD-grown monolayer MoSe2 films were uniform in thickness and highly crystalline with hexagonal crystal structures. Raman and photoluminescence spectra showed that CVD-grown monolayer MoSe2 films have similar vibrational and optical properties to those of mechanically exfoliated monolayer MoSe2. These results demonstrate that the CVD-grown monolayer MoSe2 films have reasonably high quality comparable to that of mechanically exfoliated monolayer MoSe2 flakes.

Original languageEnglish
Pages (from-to)27969-27973
Number of pages5
JournalRSC Advances
Volume7
Issue number45
DOIs
Publication statusPublished - 2017

Fingerprint

Atmospheric pressure
Chemical vapor deposition
Monolayers
Substrates
Photoluminescence
Optical properties
Crystal structure
Crystalline materials
Thin films

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

Cite this

Large-area synthesis of monolayer MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition. / Zhao, Yu; Lee, Hyunjea; Choi, Woong; Fei, Weidong; Lee, Cheol Jin.

In: RSC Advances, Vol. 7, No. 45, 2017, p. 27969-27973.

Research output: Contribution to journalArticle

Zhao, Yu ; Lee, Hyunjea ; Choi, Woong ; Fei, Weidong ; Lee, Cheol Jin. / Large-area synthesis of monolayer MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition. In: RSC Advances. 2017 ; Vol. 7, No. 45. pp. 27969-27973.
@article{aca46ce2d18745a284706c88a2c2dfbb,
title = "Large-area synthesis of monolayer MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition",
abstract = "We report the synthesis of large-scale continuous MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition (CVD). As-grown thin films were composed of a continuous monolayer of MoSe2 and extended up to a millimeter scale. The CVD-grown monolayer MoSe2 films were uniform in thickness and highly crystalline with hexagonal crystal structures. Raman and photoluminescence spectra showed that CVD-grown monolayer MoSe2 films have similar vibrational and optical properties to those of mechanically exfoliated monolayer MoSe2. These results demonstrate that the CVD-grown monolayer MoSe2 films have reasonably high quality comparable to that of mechanically exfoliated monolayer MoSe2 flakes.",
author = "Yu Zhao and Hyunjea Lee and Woong Choi and Weidong Fei and Lee, {Cheol Jin}",
year = "2017",
doi = "10.1039/c7ra03642f",
language = "English",
volume = "7",
pages = "27969--27973",
journal = "RSC Advances",
issn = "2046-2069",
publisher = "Royal Society of Chemistry",
number = "45",

}

TY - JOUR

T1 - Large-area synthesis of monolayer MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition

AU - Zhao, Yu

AU - Lee, Hyunjea

AU - Choi, Woong

AU - Fei, Weidong

AU - Lee, Cheol Jin

PY - 2017

Y1 - 2017

N2 - We report the synthesis of large-scale continuous MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition (CVD). As-grown thin films were composed of a continuous monolayer of MoSe2 and extended up to a millimeter scale. The CVD-grown monolayer MoSe2 films were uniform in thickness and highly crystalline with hexagonal crystal structures. Raman and photoluminescence spectra showed that CVD-grown monolayer MoSe2 films have similar vibrational and optical properties to those of mechanically exfoliated monolayer MoSe2. These results demonstrate that the CVD-grown monolayer MoSe2 films have reasonably high quality comparable to that of mechanically exfoliated monolayer MoSe2 flakes.

AB - We report the synthesis of large-scale continuous MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition (CVD). As-grown thin films were composed of a continuous monolayer of MoSe2 and extended up to a millimeter scale. The CVD-grown monolayer MoSe2 films were uniform in thickness and highly crystalline with hexagonal crystal structures. Raman and photoluminescence spectra showed that CVD-grown monolayer MoSe2 films have similar vibrational and optical properties to those of mechanically exfoliated monolayer MoSe2. These results demonstrate that the CVD-grown monolayer MoSe2 films have reasonably high quality comparable to that of mechanically exfoliated monolayer MoSe2 flakes.

UR - http://www.scopus.com/inward/record.url?scp=85021651800&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85021651800&partnerID=8YFLogxK

U2 - 10.1039/c7ra03642f

DO - 10.1039/c7ra03642f

M3 - Article

AN - SCOPUS:85021651800

VL - 7

SP - 27969

EP - 27973

JO - RSC Advances

JF - RSC Advances

SN - 2046-2069

IS - 45

ER -