Large-area synthesis of monolayer MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition

Yu Zhao, Hyunjea Lee, Woong Choi, Weidong Fei, Cheol Jin Lee

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

We report the synthesis of large-scale continuous MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition (CVD). As-grown thin films were composed of a continuous monolayer of MoSe2 and extended up to a millimeter scale. The CVD-grown monolayer MoSe2 films were uniform in thickness and highly crystalline with hexagonal crystal structures. Raman and photoluminescence spectra showed that CVD-grown monolayer MoSe2 films have similar vibrational and optical properties to those of mechanically exfoliated monolayer MoSe2. These results demonstrate that the CVD-grown monolayer MoSe2 films have reasonably high quality comparable to that of mechanically exfoliated monolayer MoSe2 flakes.

Original languageEnglish
Pages (from-to)27969-27973
Number of pages5
JournalRSC Advances
Volume7
Issue number45
DOIs
Publication statusPublished - 2017

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

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