Large in-plane permittivity of Ba0.6Sr0.4TiO 3 thin films crystallized using excimer laser annealing at 300°C

Min Gyu Kang, Kwang Hwan Cho, Young Ho Do, Young Jin Lee, Sahn Nahm, Seok Jin Yoon, Chong Yun Kang

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We demonstrated a way to fabricate the crystalline Ba0.6Sr 0.4TiO3 (BST) thin films using excimer laser annealing technique on the amorphous BST thin films fabricated by sol-gel process. The grain size of the laser-annealed films is larger than that of the conventionally thermal-annealed films. However, an uncrystallized, amorphous layer was observed near the film/substrate interface due to the limited laser absorption depth. The uncrystallized layer has a critical influence on out-of-plane dielectric property of BST films. The significant difference of the relative dielectric permittivity (εr) between in-plane (1383) and out-of-plane (184) directions is observed.

Original languageEnglish
Article number242910
JournalApplied Physics Letters
Volume101
Issue number24
DOIs
Publication statusPublished - 2012 Dec 10

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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