Lift-off process using bilayer ultraviolet nanoimprint lithography and methacryloxypropyl-terminated-polydimethylsiloxane-based imprint resin

Ho Yong Jung, Seon Yong Hwang, Byeong Ju Bae, Heon Lee

Research output: Contribution to journalArticle

9 Citations (Scopus)

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Engineering & Materials Science

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