Low-loss silicon waveguides with sidewall roughness reduction using a SiO2 hard mask and fluorine-based dry etching

Dong Ho Lee, Sung Joong Choo, Uiseok Jung, Kyung Woon Lee, Kwang Woong Kim, Jung Ho Park

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)

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Engineering & Materials Science

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