Low resistance and high reflectance Pt/Rh contacts to p-Type GaN for Ga N-based flip chip light-emitting diodes

Jae Ryoung Lee, Suk In Na, Jin Hee Jeong, Seung Nam Lee, Ja Soon Jang, Suk Hun Lee, Jong Je Jung, June O. Song, Tae Yeon Seong, Seong Ju Park

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

We report on a Pt(8 nm)/Rh(200 nm) metallization scheme for use in low resistance and high reflectance ohmic contacts to p-GaN for use in flip chip light-emitting diodes (FCLED) applications. The thermal annealing of a Pt/Rh contact at 500°C led to linear current-voltage characteristics with a specific contact resistance of 9.0 × 10 -5 Ω cm 2 while the as-deposited Pt/Rh contact showed nonohmic characteristics. It was also shown that the 500°C annealed contact produces a high reflectance of 62% at a wavelength of 460 nm. Auger electron spectroscopy depth profiles and glancing-angle X-ray diffraction results indicated that the low contact resistance of the annealed sample can be attributed to the formation of Ga-Pt and Ga-Rh intermetallic phases. Furthermore, the electrical performance of an FCLED with the Pt/Rh reflector scheme was superior to that of a FCLED with a Ni/Au/Ag reflector scheme.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume152
Issue number1
DOIs
Publication statusPublished - 2005 Feb 7
Externally publishedYes

Fingerprint

low resistance
Light emitting diodes
light emitting diodes
chips
Contact resistance
contact resistance
reflectance
reflectors
electric contacts
Ohmic contacts
Auger electron spectroscopy
Current voltage characteristics
Metallizing
Auger spectroscopy
Intermetallics
intermetallics
electron spectroscopy
Annealing
X ray diffraction
Wavelength

ASJC Scopus subject areas

  • Electrochemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Low resistance and high reflectance Pt/Rh contacts to p-Type GaN for Ga N-based flip chip light-emitting diodes. / Lee, Jae Ryoung; Na, Suk In; Jeong, Jin Hee; Lee, Seung Nam; Jang, Ja Soon; Lee, Suk Hun; Jung, Jong Je; Song, June O.; Seong, Tae Yeon; Park, Seong Ju.

In: Journal of the Electrochemical Society, Vol. 152, No. 1, 07.02.2005.

Research output: Contribution to journalArticle

Lee, Jae Ryoung ; Na, Suk In ; Jeong, Jin Hee ; Lee, Seung Nam ; Jang, Ja Soon ; Lee, Suk Hun ; Jung, Jong Je ; Song, June O. ; Seong, Tae Yeon ; Park, Seong Ju. / Low resistance and high reflectance Pt/Rh contacts to p-Type GaN for Ga N-based flip chip light-emitting diodes. In: Journal of the Electrochemical Society. 2005 ; Vol. 152, No. 1.
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AU - Lee, Seung Nam

AU - Jang, Ja Soon

AU - Lee, Suk Hun

AU - Jung, Jong Je

AU - Song, June O.

AU - Seong, Tae Yeon

AU - Park, Seong Ju

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