Low temperature atomic layer deposited ZnO photo thin film transistors

Feyza B. Oruc, Levent E. Aygun, Inci Donmez, Necmi Biyikli, Ali K. Okyay, Hyun-Yong Yu

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

ZnO thin film transistors (TFTs) are fabricated on Si substrates using atomic layer deposition technique. The growth temperature of ZnO channel layers are selected as 80, 100, 120, 130, and 250°C. Material characteristics of ZnO films are examined using x-ray photoelectron spectroscopy and x-ray diffraction methods. Stoichiometry analyses showed that the amount of both oxygen vacancies and interstitial zinc decrease with decreasing growth temperature. Electrical characteristics improve with decreasing growth temperature. Best results are obtained with ZnO channels deposited at 80°C; Ion/Ioff ratio is extracted as 7.8 × 109 and subthreshold slope is extracted as 0.116 V/dec. Flexible ZnO TFT devices are also fabricated using films grown at 80°C. ID-VGS characterization results showed that devices fabricated on different substrates (Si and polyethylene terephthalate) show similar electrical characteristics. Sub-bandgap photo sensing properties of ZnO based TFTs are investigated; it is shown that visible light absorption of ZnO based TFTs can be actively controlled by external gate bias.

Original languageEnglish
Article number01A105
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume33
Issue number1
DOIs
Publication statusPublished - 2015 Jan 1

Fingerprint

Thin film transistors
Growth temperature
transistors
thin films
X rays
terephthalate
Temperature
Polyethylene Terephthalates
Atomic layer deposition
polyethylene terephthalate
Substrates
Oxygen vacancies
Photoelectron spectroscopy
atomic layer epitaxy
electromagnetic absorption
Stoichiometry
Polyethylene terephthalates
Light absorption
x ray spectroscopy
temperature

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Low temperature atomic layer deposited ZnO photo thin film transistors. / Oruc, Feyza B.; Aygun, Levent E.; Donmez, Inci; Biyikli, Necmi; Okyay, Ali K.; Yu, Hyun-Yong.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 33, No. 1, 01A105, 01.01.2015.

Research output: Contribution to journalArticle

Oruc, Feyza B. ; Aygun, Levent E. ; Donmez, Inci ; Biyikli, Necmi ; Okyay, Ali K. ; Yu, Hyun-Yong. / Low temperature atomic layer deposited ZnO photo thin film transistors. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2015 ; Vol. 33, No. 1.
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