Low-temperature fabrication of high-quality (Ba,Sr)TiO3 films using charged liquid cluster beam method

Hyungsoo Choi, Sungho Park, Yi Yang, Ho Chu Kang, Kyekyoon Kevin Kim, Man Young Sung, Ho Gyeom Jang

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Low-temperature deposition of high-quality (Ba,Sr)TiO3 (BST) thin films was achieved in air on Pt/Ti/SiO2/Si substrates using the charge liquid cluster beam (CLCB) method. The Ba, Sr, and Ti precursors were synthesized using alkoxy carboxylate ligands to tailor their physical properties to the CLCB process. The as-deposited BST films fabricated at substrate temperatures as low as 280°C exhibited high purity. The leakage current density and dielectric constant of the film, deposited at 300°C and subsequently annealed at 700°C, were 2.5 × 10-9 A/cm2 at 1.5 V and 305, respectively.

Original languageEnglish
Pages (from-to)1888-1891
Number of pages4
JournalJournal of Materials Research
Volume17
Issue number8
Publication statusPublished - 2002 Aug 1

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Fabrication
fabrication
Liquids
Substrates
liquids
Leakage currents
carboxylates
purity
leakage
Permittivity
Current density
Physical properties
physical properties
Ligands
permittivity
current density
Thin films
Temperature
ligands
air

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Low-temperature fabrication of high-quality (Ba,Sr)TiO3 films using charged liquid cluster beam method. / Choi, Hyungsoo; Park, Sungho; Yang, Yi; Kang, Ho Chu; Kim, Kyekyoon Kevin; Sung, Man Young; Jang, Ho Gyeom.

In: Journal of Materials Research, Vol. 17, No. 8, 01.08.2002, p. 1888-1891.

Research output: Contribution to journalArticle

Choi, Hyungsoo ; Park, Sungho ; Yang, Yi ; Kang, Ho Chu ; Kim, Kyekyoon Kevin ; Sung, Man Young ; Jang, Ho Gyeom. / Low-temperature fabrication of high-quality (Ba,Sr)TiO3 films using charged liquid cluster beam method. In: Journal of Materials Research. 2002 ; Vol. 17, No. 8. pp. 1888-1891.
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